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Evaluation of e-beam SiO₂ for MIM applicationGuo, Wei. January 2010 (has links)
Thesis (M. Sc.)--University of Alberta, 2010. / Title from pdf file main screen (viewed on July 2, 2010). A thesis submitted to the Faculty of Graduate Studies and Research in partial fulfillment of the requirements for the degree of Master of Science in Materials Engineering, Department of Chemical and Materials Engineering, University of Alberta. Includes bibliographical references.
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