A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding. / Singapore-MIT Alliance (SMA)

The goal of this research is to develop an integrated polymer embossing module, with which difficult-to-emboss polymer microstructures and microparts can be fabricated in a cost-effective manner. In particular, the research addresses three major limitations of the hot embossing process, namely, long cycle time, difficulty in producing shell patterns, and difficulty in building up a high embossing pressure on thick substrates. To overcome these limitations, three new technical approaches two-station embossing, rubber-assisted embossing, and through-thickness embossing were developed and investigated. Fundamental understanding of these new embossing techniques were achieved through extensive experimental and theoretical studies involving parametric experiments, rheological characterization, surface investigation, mathematical modeling, and computer simulation.