La miniaturisation des batteries est devenue un défi technologique pour certaines industries. Ces micro-batteries, d’une dizaine de micromètres d’épaisseur, ont pour objectif d’alimenter des systèmes de taille réduite. Le LIPON est un des électrolytes envisagés pour leur fabrication. Il est déposé en couche-mince par pulvérisation magnétron radiofréquence de Li₃PO₄ sous plasma d’azote. Cette thèse étudie le comportement des particules au sein du plasma et formant le dépôt. Des mesures expérimentales d’émission optique et de densité électronique ont été mises en place, afin de fournir des données d’entrée et de validation pour différents modèles numériques. Le premier modèle décrit la cinétique réactionnelle au coeur du plasma, en 0D, afin d’identifier les espèces chimiques majoritaires et les réactions dominantes. Ceci a permis de concevoir une cinétique simplifiée pour le second modèle, 2D, traitant le déplacement des espèces chargées dans le plasma et permettant de caractériser la pulvérisation de la cible par les ions, tant au niveau des zones de pulvérisation de leur énergie et angle d’incidence. Les résultats obtenus ont été employés dans un modèle 3D simulant les trajectoires des atomes pulvérisés, afin d’étudier la répartition atomique sur le substrat et de déduire la composition de la couche mince déposée. Des caractéristiques propres à la cible lors de la pulvérisation ont été mises en évidence et confirmées par la comparaison entre les résultats numériques et expérimentaux. / The scale reduction of batteries is a real technological challenge for the near future. These micro-batteries, about ten micrometers thick, are used to supply the power for small sized systems. LIPON is one of the most suitable electrolytes considered for industrial scale production. It is deposited in thin-film by radiofrequency magnetron sputtering of Li₃PO₄ in nitrogen plasma. This thesis is focused on particles behavior in plasma and during deposition. Optical emission spectroscopy and electron density measurements have been performed, to provide data used as input or validation for several numerical models. The first model describes plasma kinetics in the magnetron reactor, as 0D global model, and helps to identify the main chemical species and important reactions. This information has been useful to define a simplified kinetics for the second model, 2D, dealing with the charged species behavior in the plasma and describing target sputtering by ion bombardment. It provides the sputtered areas, ion energy and impinging angle onto the target. These obtained results have been employed in a 3D model that simulates sputtered atoms transport from the target to the substrate and predicting the thin-film features. Some characteristics of the target during sputtering have been highlighted and confirmed by the direct comparison between numerical and experimental results.

With the rapid growth of the world population and the process of industrialization of modern society, the demand for energy continues to rise sharply. There is a pessimistic prediction that a peak of consumption primarily fossil fuels will happen in the 2020s to 2030s, hence it is urgent to develop alternative renewable clean energy sources before this coming energy crisis. But the availability of renewable clean energy always is discontinuous, uncontrollable, and unstable. Besides, the generated renewable energy cannot be used directly. Therefore, an energy storage system is urgently needed as the medium to harvest and store the energy generated from the intermittent renewable resource, and also to regulate the electricity output, and improve the tolerance ability of the power grid to renewable energy. Rechargeable aqueous zinc-ion battery, especially those that use mild electrolytes, is drawing more and more attention in the past decades and is regarded as the most promising candidate for large-scale energy storage systems. Compared with the widely used lithium-ion battery which dominated the commercial energy market now, the aqueous zinc-ion battery holds the merits of high theoretical capacity (820 mAh/g gravimetric capacity and 5855 mAh/m3 volumetric capacity), low electrochemical potential (-0.763 V vs. SHE) and high energy density due to the two-electron redox reaction, high abundance in the earth crust and high mass production, low toxicity, and environmental benignity, and the most valuable advantage intrinsic safety in aqueous electrolyte. In this dissertation, the first part focuses on the preliminary application of an aqueous zinc-ion battery. One kind of planar on-chip aqueous zinc-ion micro-battery with high-rate performance was designed and fabricated. The PEDOT and MnO2 cathode can suppress the dissolution of electrode material which can highly improve the cycling performance of the micro-battery. The as-prepared micro-battery displays a high specific capacity of 25.8 μAh/cm2 after 25 activation cycles at a current density of 1 mA/cm2. A reversible specific capacity of 6.2 μAh/cm2 is achieved after 200 cycles, with 55.4 % of the initial discharge capacity retention. To improve the cycling performance of the aqueous zinc-ion battery, the second part of this thesis is preparing a highly enhanced reversibility Zn anode by in-situ texturing. The crystal plane (002)-textured Zn anode with an ultrathin passivation layer suppressed the Zn corrosion and enhanced the full battery performance. Based on these merits, the cycling stability of the Zn anode is enhanced from 791 hours to more than 1500 hours. The coulombic efficiency (CE) of a Zn||Ti asymmetric cell is greater than 90% over 500-hour cycles. For the Zn||MnO2 full cell, the addition of H3PO4 into the electrolyte improves both the rate capability and cycling stability of Zn||MnO2 cells. More importantly, a highly reversible Zn||O2 full cell is demonstrated at a large depth of discharge of Zn (DODZn > 10%), projecting the lower bounds of the cell-level specific energy of lithium-ion batteries.:Abstract I Kurzfassung III List of Abbreviations IX Chapter 1 Background and motivation 1 1.1 Research motivation 1 1.2 Aim of this dissertation 2 1.3 Dissertation structure 3 Chapter 2 Introduction of aqueous zinc-ion battery and anode protection strategies 5 2.1 Introduction of aqueous zinc-ion battery 5 2.2 The challenges of zinc anode 8 2.2.1 Dendrites and protrusion 9 2.2.2 Hydrogen evolution reaction 10 2.2.3 Passivation layer 10 2.3 The strategies of zinc anode protection 11 2.3.1 Surface engineering 11 2.3.2 Electrolyte modification 15 2.3.3 3D structural skeleton and alloy strategies 22 Chapter 3 Experiment characterizations and calculations 25 3.1 Electrochemical methods 25 3.1.1 Chronoamperometry 25 3.1.2 Chronopotentiometry 26 3.1.3 Cyclic voltammetry 27 3.1.4 Galvanostatic charge/discharge 28 3.1.5 Electrochemical impedance spectroscopy 29 3.1.6 Tafel measurement 30 3.2 Characterization methods 31 3.2.1 X-ray diffraction 31 3.2.2 Scanning electron microscope 32 3.2.3 X-ray photoelectron spectroscopy 32 3.2.4 Raman spectroscopy 33 3.3 Experimental calculations 34 3.3.1 b value calculation 34 3.3.2 CE calculation 34 3.3.3 RTC calculation 35 3.3.4 DFT calculation 36 3.3.5 DOD calculation 37 3.3.6 Corrosion rate calculation 38 Chapter 4 A planar on-chip aqueous zinc-ion micro-battery with high-rate performance 41 4.1 Introduction 41 4.2 Experimental section 43 4.2.1 Interdigitated electrodes 43 4.2.2 Preparation of micro-battery 44 4.2.3 Microstructural properties characterization 45 4.2.4 Electrochemical characterization 45 4.3 Results and discussion 46 4.3.1 Characterization of micro-battery 46 4.3.2 Electrochemical performance measurement 49 4.4 Conclusions 56 Chapter 5 Highly enhanced reversibility of a Zn anode by in-situ texturing 57 5.1 Introduction 57 5.2 Experimental section 63 5.2.1 Preparation of the textured Zn anode 63 5.2.2 Synthesis of cathode materials 63 5.2.3 Electrochemical and material characterizations 64 5.3 Results and discussions 64 5.3.1 Nonuniform Zn deposition on an epitaxial substrate 65 5.3.2 In-situ texturing and SEI formation during the cycling 72 5.3.3 Full-cell performance 77 5.4 Conclusions 81 Chapter 6 Summary and outlook 83 6.1 Summary 83 6.2 Outlook 84 References： 87 Acknowledgment 99 Publications 101 Curriculum Vitae 103 Selbstständigkeitserklärung 105

The research work presented in this thesis reports for the first time the fabrication of Titanium Niobium complex oxide (TiNb2O7 (TNO)) thin films by employing pulsed laser deposition and their use as the anode material in Li-ion micro batteries. Chapter 1 provides a brief introduction to complex metal oxides as multifunctional materials. In the first section of this chapter, a brief introduction is given about the history of TNO complex oxide material. The complex structure and properties of TNO oxide are also discussed briefly. In the second section, the importance and need of thin film batteries in emerging applications is discussed. Finally, the specific objectives of the current research are outlined in the last section. Chapter 2 gives the details about various experimental methods and characterization tools used in this research. The first part gives a brief overview about the principles and the use of different experimental methods involved in the growth of TNO thin films using pulsed laser deposition. Details, including the laboratory setup designed for PLD growth, also described briefly. In the second part, the different state-of-the-art characterization tools used in this research are described in terms of their principles and their applications such as measuring structural, morphological, chemical and electrochemical properties. Chapter 3 describes the synthesis and characterization of TNO bulk targets prepared via solid state reaction. In the first part, the detailed descriptions of experimental conditions are given. In the second part, the study of as-prepared TNO targets by various characterization tools such as XRD, Raman, SEM and XPS for understanding its structure, morphology and chemical properties are discussed briefly. The emphasis is made on the preparation of a quality target by careful observations. Chapter 4 mainly describes the comprehensive studies carried out on the fabrication and characterization of TNO thin films using PLD. In the first part, the preliminary experimental conditions for the growth of TNO thin films on Pt (200)/TiO2/SiO2/ Si (100) substrates are explained briefly. The importance of primary understanding about target-laser interaction through the structural, morphology changes observed by various characterization tools is discussed. In the latter part of the chapter, the effects of systematic variation of deposition parameters on the properties of the grown TNO thin films are described extensively. Various advanced characterization tools are used to study the changes in as-grown TNO thin films in terms of their structural, morphological and chemical changes by various advanced characterization tools. Chapter 5 is an account of the state-of-the-art characterization tools that are used on the as-grown TNO thin films for determining structural, compositional and elemental information with nanometer spatial resolution. In the first part, the effects of various processing conditions used during FIB are discussed briefly, along with observed results. An attempt has been made to solve the experimental difficulties during FIB for cross sectional sample preparation for HRTEM analysis. Later, the imaging, diffraction and spectroscopic studies carried out on TNO thin films using HRTEM, STEM HAADF, and EDXS elemental mapping are discussed in detail. Finally, obtained results are correlated to the experimental conditions during PLD growth. Chapter 6 focuses on the usage of as-grown TNO thin films as a new anode material in rechargeable Li-ion micro batteries. The various experimental details, battery cell fabrication, etc are described in the first part of the chapter. Then the comprehensive studies are carried out for demonstrating TNO thin films as anode material in micro batteries. Besides this, the basic cyclic voltammogram and charge-discharge tests carried out on a TNO electrode are discussed in detail. The structural, morphological studies are done before and after the electrochemical cell reaction to understand the crystal stability of TNO as an anode electrode. The effects of important experimental parameters on their electrochemical properties are also described briefly. Finally, the observed results are compared with existing literature. Chapter 7 summarizes the present research reported in this thesis and discusses the future research that could give insight into the understanding and optimization of TNO thin films for better usage in battery applications.