Diss. Teknillinen korkeakoulu, 2006. / Myös verkkojulkaisuna.

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Thesis (Ph.D.)--Hong Kong University of Science and Technology, 2005. / Includes bibliographical references. Also available in electronic version.

Carbon nanotubes (CNTs) have been extensively studied for their electrical and mechanical properties since its discovery. Owing to their minute dimensions, good mechanical, electrical and chemical properties, different groups started to utilize CNTs as nano sensors or actuators for different applications in nanoelectronic or nano-electro-mechanical systems (NEMS). In order to build practical CNTs based devices, fast and batch techniques to build them have to be developed. To manipulate these nano-sized tubes, atomic force microscopy (AFM) is typically used to manipulate each of them one-by-one. However, this is time-consuming and unrealistic for batch fabrication. In this dissertation, dielectrophoretic manipulation of carbon nanotubes was employed to rapidly and batch fabricate practical nano sensors. The proposed technology will potentially enable fully automated assembly of CNTs based devices. We have also shown that this electrokinetic based manipulation technique is compatible with room-temperature MEMS fabrication processes, and hence, MEMS structures embedded with carbon nanotubes sensing elements can be built. This encapsulation process ensures that the multi-walled carbon nanotubes (MWNTs) elements can be protected from moisture and contaminates in an operational environment, and thus, allows the sensors to be useful for potential applications such as temperature measurement in water, sensing human touch and body temperature, or as ultra-sensitive sensors in manufacturing plants. Different structures of the polymer thin films embedded CNTs sensors were designed and fabricated on silicon and polymer substrates and also integrated to polymer diaphragm and microfluidic channel for micro and nano scale sensing. In this work, CNTs were found as a novel sensing elements for ultra-low-power micro thermal, fluid-flow and piezoresistive pressure sensors---which may serve as alternative sensors for silicon based sensors when bio-compatibility and low-cost applications are required. / Fung Kar Man. / "August 2005." / Adviser: Wen Tung Li. / Source: Dissertation Abstracts International, Volume: 67-07, Section: B, page: 4058. / Thesis (Ph.D.)--Chinese University of Hong Kong, 2005. / Includes bibliographical references (p. 91-98). / Electronic reproduction. Hong Kong : Chinese University of Hong Kong, [2012] System requirements: Adobe Acrobat Reader. Available via World Wide Web. / Electronic reproduction. [Ann Arbor, MI] : ProQuest Information and Learning, [200-] System requirements: Adobe Acrobat Reader. Available via World Wide Web. / Abstract in English and Chinese. / School code: 1307.

Sun Winston. / "December 1999." / Thesis (Ph.D.)--Chinese University of Hong Kong, 1999. / Includes bibliographical references (p. 149-159). / Electronic reproduction. Hong Kong : Chinese University of Hong Kong, [2012] System requirements: Adobe Acrobat Reader. Available via World Wide Web. / Mode of access: World Wide Web. / Abstracts in English and Chinese.

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references. Available also from UMI/Dissertation Abstracts International.

Thesis (M.S.)--Florida State University, 2004. / Advisor: Dr. Yousef Haik, Florida State University, College of Engineering, Dept. of Mechanical Engineering. Title and description from dissertation home page (viewed June 16, 2004). Includes bibliographical references.

Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: thermal effects, MEMS switches, RF switches. Includes bibliographical references (p. 123-127).