Spelling suggestions: "subject:"microelectromechanical systems."" "subject:"microelectronmechanical systems.""
1 |
An evaluation system for mechanical and electrical characterization of MEMS devicesKim, Seong Jin, Dean, Robert Neal, January 2009 (has links)
Thesis--Auburn University, 2009. / Abstract. Vita. Includes bibliographical references (p. 67-69).
|
2 |
Design, fabrication, and characterization of a MEMS thermal switch and integration with a dynamic micro heat engineCho, Jeong-Hyun, January 2007 (has links) (PDF)
Thesis (Ph. D. engineering science)--Washington State University, December 2007. / Includes bibliographical references (p. 181-191).
|
3 |
Thermal analysis and design of a MEMS-based safety and arming systemMachiraju, Harita. January 2007 (has links)
Thesis (M.S.)--State University of New York at Binghamton, Mechanical Engineering Dept., 2007. / Includes bibliographical references.
|
4 |
Through-wafer interrogation of MEMS device motionDawson, Jeremy M. January 1999 (has links)
Thesis (M.S.)--West Virginia University, 1999. / Title from document title page. Document formatted into pages; contains xii, 122 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 119-122).
|
5 |
Controlled multi-batch self-assembly of micro devices /Xiong, Xiaorong. January 2004 (has links)
Thesis (Ph. D.)--University of Washington, 2004. / Vita. Includes bibliographical references (p. 124-136).
|
6 |
A method for testing the dynamic accuracy of Microelectro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) sensors for Inertial Navigation Systems (INS) and human motion tracking applicationsCookson, Jeremy L. January 2010 (has links) (PDF)
Thesis (M.S. in Electrical Engineering)--Naval Postgraduate School, June 2010. / Thesis Advisor(s): Yun, Xiaoping ; Second Reader: Romano, Marcello. "June 2010." Description based on title screen as viewed on July 14, 2010. Author(s) subject terms: micro-electro-mechanical systems, MEMS, magnetic, angular rate, gravity sensor, MARG sensors, inertial navigation system, INS, inertial test, MicroStrain, 3DM-GX1, 3DMGX3, CompactRIO, MATLAB GUI, dynamic accuracy test. Includes bibliographical references (p. 187-189). Also available in print.
|
7 |
MEMS for heterogeneous integration of microsystems /Nallani, Arun Kumar, January 2005 (has links)
Thesis (Ph.D.) -- University of Texas at Dallas, 2005 / Includes vita. Includes bibliographical references (leaves 139-145)
|
8 |
Energy harvesting for self-powered, ultra-low power microsystems with a focus on vibration-based electromechanical conversionForester, Sean M. January 2009 (has links) (PDF)
Thesis (M.S. in Computer Science)--Naval Postgraduate School, September 2009. / Thesis Advisor(s): Singh, Gurminder ; Gibson, John. "September 2009." Description based on title screen as viewed on November 6, 2009. Author(s) subject terms: Microelectromechanical systems, photovoltaic, piezoelectric, thermocouple, power harvesting, energy scavenging, thermoelectric. Includes bibliographical references (p. 59-65). Also available in print.
|
9 |
Development of a noncontact current sensor based on MEMS technologyMustafa, Haithem Ali Babiker January 2007 (has links)
Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007 / Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different
design materials and structures. The benefit ofMEMS technology is in developing devices having
lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam
made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been
designed using MEMS software tools. The magnetic material was used to improve the sensitivity of
the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected
using capacitive sensing method. The aim of this research was to develop a non-contact current sensor
based on MEMS technology by analysing the simulation of the system design of the micro cantilever
when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal
current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion
along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance
changes and generates a voltage output proportional to the capacitive change in the signal processing
circuitry attached to the micro cantilever.
Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of
{ the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential
capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity
the circuit designed for readout was derived.
|
10 |
Analysis of micro-scale EDMTibbles, Christopher Jeremy 17 November 2014 (has links)
M.Ing. (Mechanical Engineering) / Micro electromechanical systems (MEMS) are presented and the application of electro discharge machining (EDM) to this scale of manufacture is discussed. A model relating input variables to output variables of micro scale EDM is developed using dimensionless groups and least squares regression. The model is used in a numeric simulation that ultimately predicts the space of a micro crater. Experimental validation is performed to check the reliability of the model by comparing the measurable experimental outputs with the outputs predicted by the model. The results and validity of the model are discussed.
|
Page generated in 0.1131 seconds