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Mems 3-D scan mirror for an endoscopic confocal microscopeShao, Yuhe. January 2005 (has links) (PDF)
Thesis (Ph. D.)--Montana State University--Bozeman, 2005. / Typescript. Chairperson, Graduate Committee: David L. Dickensheets. Includes bibliographical references (leaves 111-115).
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Laser beam interaction with materials for microscale applicationsNowakowski, Krzysztof A. January 2005 (has links)
Dissertation (Ph.D.)--Worcester Polytechnic Institute. / Keywords: laser beam characteristics; heat transfer; hole profile; MEMS; hole formation; laser micromachining; laser microdrilling; plasma effects; silicon; 304 stainless steel; Fourier theory; lattice-phonon vibration. Includes bibliographical references. (p.379-390)
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Electrostatic microactuator controlFinkler, Ofer. January 2009 (has links)
Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2010. / Committee Chair: Degertekin, Levent, F.; Committee Member: Albert B Frazier; Committee Member: Oliver Brand. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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Electrokinetically-driven liquid flows in microchannels using surface-chemistry technology /Hau, Lap Wing. January 2005 (has links)
Thesis (Ph.D.)--Hong Kong University of Science and Technology, 2005. / Includes bibliographical references (leaves 133-139). Also available in electronic version.
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Novel performance analysis techniques with application to the scaling properties of silicon micromotor structures /MacKay, D. Kyle. Findlay, Raymond. January 2000 (has links)
Thesis (Ph. D.)--McMaster University, 2000. / Advisor: Raymond Findlay. Includes bibliographical references (leaves 222-228). Also available online.
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Diffraction-based integrated optical readout for micromachined optomechanical sensorsLee, Wook. January 2006 (has links)
Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2006. / F. Levent Degertekin, Committee Chair ; David S. Citrin, Committee Member ; Paul E. Hasler, Committee Member ; Peter J. Hesketh, Committee Member ; Zhiping Zhou, Committee Member.
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Characterization of diffractive optical lenses for use in MEMS integrated optical monitoringHollandsworth, Christopher W. January 2006 (has links)
Thesis (M.S.)--West Virginia University, 2006. / Title from document title page. Document formatted into pages; contains x, 133 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 132-133).
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Mechanics of micro-capacitive accelerometer with u-shape cantilever beam /Wang, Lin. January 1900 (has links)
Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005. / Word processed copy. Summary in English and Chinese. Includes bibliographical references. Also available online.
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Microstructural and geometric effects on the piezoelectric performance of PZT MEMSRobinson, Michelle Christina, January 2007 (has links) (PDF)
Thesis (Ph. D.)--Washington State University, December 2007. / Includes bibliographical references.
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Characterization and modeling of dielectric-charging effects in RF MEMS capacitive switches /Yuan, Xiaobin, January 2006 (has links)
Thesis (Ph. D.)--Lehigh University, 2006. / Includes vita. Includes bibliographical references (leaves 86-90).
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