Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. To achieve a sustainable manufacturing with zero defects in the future, there is an urgent need for reliable inspection systems. The systems to be developed have to perform high-resolution in-process quality control at high speed. Optical coherence tomography (OCT) is a promising technology for detailed in-depth inspection and metrology. Combined with infrared screening of larger areas it can solve the inspection demands in the roll-to-roll ceramic tape processes. In this thesis state-of-art commercial and laboratory OCT systems, operating at the central wavelength of 1.3 µm and 1.7 µm respectively, are evaluated for detecting microchannels, metal prints, defects and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometers beneath surfaces. The effect of surface roughness induced scattering and scattering by pores on the probing radiation, is analyzed by experimentally captured and theoretically simulated OCT images of the ceramic samples, while varying surface roughnesses and operating wavelengths. By extending the Monte Carlo simulations of the OCT response to the mid-infrared the optimal operating wavelength is found to be 4 µm for alumina and 2 µm for zirconia. At these wavelengths we predict a sufficient probing depth of about 1 mm and we demonstrate and discuss the effect of rough surfaces on the detectability of embedded boundaries. For high-precision measurement a new and automated 3D image processing algorithm for analysis of volumetric OCT data is developed. We show its capability by measuring the geometric dimensions of embedded structures in ceramic layers, extracting features with irregular shapes and detecting geometric deformations. The method demonstrates its suitability for industrial applications by rapid inspection of manufactured samples with high accuracy and robustness. The new inspection methods we demonstrate are finally analyzed in the context of measurement uncertainty, both in the axial and lateral cases, and reveal that scattering in the sample indeed affects the lateral measurement uncertainty. Two types of image artefacts are found to be present in OCT images due to multiple reflections between neighboring boundaries and inhomogeneity of refractive index. A wavefront aberration is found in the OCT system with a scanning scheme of two galvo mirrors, and it can be corrected using our image processing algorithm. / <p>QC 20140428</p> / Multilayer (FP7-NMP4-2007-214122)

Plasmonic properties and the related novel applications are studied on various types of metallic nano-structures in one, two, or three dimensions. For 1D nanostructure, the motion of free electrons in a metal-film with nanoscale thickness is confined in its normal dimension and free in the other two. Describing the free-electron motion at metal-dielectric surfaces, surface plasmon polariton (SPP) is an elementary excitation of such motions and is well known. When further perforated with periodic array of holes, periodicity will introduce degeneracy, incur energy-level splitting, and facilitate the coupling between free-space photon and SPP. We applied this concept to achieve a plasmonic perfect absorber. The experimentally observed reflection dip splitting is qualitatively explained by a perturbation theory based on the above concept. If confined in 2D, the nanostructures become nanowires that intrigue a broad range of research interests. We performed various studies on the resonance and propagation of metal nanowires with different materials, cross-sectional shapes and form factors, in passive or active medium, in support of corresponding experimental works. Finite- Difference Time-Domain (FDTD) simulations show that simulated results agrees well with experiments and makes fundamental mode analysis possible. Confined in 3D, the electron motions in a single metal nanoparticle (NP) leads to localized surface plasmon resonance (LSPR) that enables another novel and important application: plasmon-heating. By exciting the LSPR of a gold particle embedded in liquid, the excited plasmon will decay into heat in the particle and will heat up the surrounding liquid eventually. With sufficient exciting optical intensity, the heat transfer from NP to liquid will undergo an explosive process and make a vapor envelop: nanobubble. We characterized the size, pressure and temperature of the nanobubble by a simple model relying on Mie calculations and continuous medium assumption. A novel effective medium method is also developed to replace the role of Mie calculations. The characterized temperature is in excellent agreement with that by Raman scattering. If fabricated in an ordered cluster, NPs exhibit double-resonance features and the double Fano-resonant structure is demonstrated to most enhance the four-wave mixing efficiency.