Thesis (M.S. in Applied Physics)--Naval Postgraduate School, December 2003. / Thesis advisor(s): Young W. Kwon, James H. Luscombe. Includes bibliographical references (p. 53-57). Also available online.

With the decrease in feature size in semiconductor manufacturing, molecular contamination problems are increased significantly. In order to optimize the yields in wafer fabrication units there is a need for process modeling that addresses the details of wafer contamination. Wafer contamination and cleaning is a complex process that covers various length and time scale events and phenomena. At the largest scales, there is the availability and transport of specific species within the fabrication unit and subsequent contamination of the wafer surface either through processing steps or through simple ambient transport processes. To limit wafer contaminant levels and/or to decontaminate them, wafers in the semiconductor fabrication unit are often cleaned and transported in a closed enclosure called Front Opening Unified Pod (FOUP) and purged with an inert gas like nitrogen. For the FOUP geometry, I analyze the large scale process modeling approaches to cleaning wafers. At smaller scales, the specific molecular configuration of the contaminant species impacts the kinetic chemical-physical cleaning mechanisms. To determine, from a fundamental perspective, the mechanisms contributing to wafer cleaning requires different scale tools from transport tools aimed at characterizing equipment scale (e.g., FOUP) contamination issues. I use molecular dynamics models and optimization techniques to infer physicochemical rates for molecular desorption on wafer surfaces. This dissertation considers these problems from a common perspective. The objective of this study has been to characterize the multi-scale problem of wafer cleaning with the objective of developing appropriate tools and models at different scales to best predict the dynamics of contaminant removal from wafer surfaces. A standardized method has been presented to extract kinetic rate parameters using molecular dynamics simulation (smaller-scale) and optimization for use in a larger-scale model of wafer decontamination using computational fluid dynamics (CFD). Also, by using available experimental data and CFD analysis an optimized FOUP purging recipe for better decontamination is presented and the relative magnitude of the time scales associated with surface kinetics and FOUP purging have been estimated. / text

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published_or_final_version / abstract / toc / Chemistry / Master / Master of Philosophy

published_or_final_version / Physics / Master / Master of Philosophy

No description available.

Το αντικείμενο της παρούσας διατριβής είναι η πειραματική και θεωρητική ανάλυση με τη χρήση Μοριακής Δυναμικής του μηχανισμού φωτοαποδόμησης μεταλλικών υλικών που προκαλείται από την επίδραση ακτίνων Laser. Η τεχνολογία των μικρο-κατεργασιών με Laser είναι μια νέα τεχνολογία που επιτρέπει τη δημιουργία εξαρτημάτων σε κλίματα μικρομέτρου. Για την υλοποίηση των μικρο-κατεργασιών με Laser χρησιμοποιούνται συστήματα Laser υπερβραχέων παλμών. Φωτοαποδόμηση είναι η διαδικασία αφαίρεσης υλικού, που ακολουθεί την εφαρμογή δέσμης Laser σε αυτό και ουσιαστικά αποτελεί συνδυασμό εξάχνωσης, εξάτμισης και τήξης. Χαρακτηρίζεται από ιδιαίτερα μικρά χρονικά και χωρικά μεγέθη, καθώς και από ακραίες τιμές θερμοκρασίας και πίεσης. Η Μοριακή Δυναμική (ΜΔ) είναι μια αιτιοκρατική μέθοδος προσομοίωσης. Βασίζεται στην επίλυση του δευτέρου νόμου του Νεύτωνα με σκοπό την παρακολούθηση της κίνησης κάθε σωματιδίου σε ένα σύστημα. Η παρούσα διατριβή επικεντρώνεται στην ανάπτυξη μαθηματικών μοντέλων ΜΔ ικανών να προβλέψουν τα διάφορα χαρακτηριστικά της διεργασίας όπως είναι η κρυσταλλική δομή του υλικού πριν την επίδραση της δέσμης Laser, την χρονική και χωρική κατανομή των φωτονίων που μεταφέρονται από τη δέσμη Laser και τη συμπεριφορά των ακτινοβολούμενων σωματιδίων. Τα μοντέλα αυτά συνδυαζόμενα επιτρέπουν τον προσδιορισμό του βάθους φωτοαποδόμησης που προκαλείται σε ένα μεταλλικό υλικό, το οποίο έχει υποστεί ακτινοβολία με υπερβραχείς παλμούς Laser, το παραγόμενο θερμοκρασιακό πεδίο, καθώς και τη χρονική εξέλιξη της θερμοκρασιακής κατανομής. Μετά την πειραματική επιβεβαίωση των θεωρητικών αποτελεσμάτων και της μεθόδου ΜΔ αναλύονται οι μηχανισμοί που οδηγούν στην φωτοαποδόμηση των μεταλλικών υλικών. Ο υπολογιστικός κώδικας παράλληλης επεξεργασίας που αναπτύχθηκε βασίσθηκε πλήρως στη δομή της μεθοδολογίας. Το σημαντικότερο συμπέρασμα που προκύπτει από την συγκεκριμένη διατριβή είναι ότι το βάθος φωτοαποδόμησης καθώς και ο μηχανισμός αυτής εξαρτώνται κυρίως από την πυκνότητα ενέργειας του υπερβραχέου παλμού (J/cm2) που επιδρά στο μεταλλικό υλικό. Τα διάφορα χαρακτηριστικά της διεργασίας μπορούν να προβλεφθούν και να χρησιμοποιηθούν για τον αποδοτικότερο προγραμματισμό της. / The objective of the present thesis is the experimental and theoretical investigation, using Molecular Dynamics, of the mechanisms leading to ablation of metallic materials due to Laser radiation. Laser micro machining is an emerging technology capable of producing parts in the micro and submicron scale. For such application Lasers with pulse duration in the femptosecond range are widely used. A phenomenon called “Laser ablation” is involved in the Laser micromachining. Laser Ablation is the process of material removal after the irradiation of a Laser beam onto the material and causes a combination of sublimation, vaporization and melting. It is commonly characterized by small temporal and spatial scales and extremely high material temperature and pressure. Molecular Dynamics (MD) is a deterministic simulation method. It is based on the solution of Newton’s second law and aims on the monitoring of the movements of an atom within a system. The present work has employed MD models for describing the characteristics and output of the process, i.e. the crystal structure of the metallic material prior to Laser irradiation, the temporal and spatial distribution of the photons produced by the Laser beam and the behavior of the material particles after irradiation. These models when coupled allow the estimation of the ablation depth caused in a metallic material when irradiated with femptosecond Laser pulses, produced temperatures field and the temporal evolution of temperature within the material. Experimental results affirm theoretical MD results and drive to the illustration of the ablation mechanisms. The computational code developed uses parallel processing techniques and is based on the structure of the developed methodology. The main conclusion of this work is that the ablation depth, as well as its mechanisms, are strongly depended to the Laser fluence (J/cm2) of the femptosecond pulse. Process characteristics can be predicted and used for a more efficient process programming.

Simulation of quantum dynamics for many-body systems is an open area of research. For interacting many-body quantum systems, the computer memory necessary to perform calculations has an astronomical value, so that approximated models are needed to reduce the required computational resources. A useful approximation that can often be made is that of quantum-classical dynamics, where the majority of the degrees are treated classically, while a few of them must be treated quantum mechanically. When energy is exchanged very quickly between the quantum subsystem and classical environment, the dynamics is nonadiabatic. Most theories for nonadiabatic dynamics are unsatisfactory, as they fail to properly describe the quantum backreaction of the subsystem on the environment. However, an approach based on the quantum-classical Liouville equation solves this problem. Even so, nonadiabatic dynamics is di cult to implement on a computer, and longer simulation times are often inaccessible due to statistical error. There is thus a need for improved algorithms for nonadiabatic dynamics. In this thesis, two algorithms that utilise the quantum-classical Liouville equation will be qualitatively and quantitatively compared. In addition, stochastic sampling schemes for nonadiabatic transitions will be studied, and a new sampling scheme is introduced [D. A. Uken et al., Phys. Rev. E. 88, 033301 (2013)] which proves to have a dramatic advantage over existing techniques, allowing far longer simulation times to be calculated reliably. / Thesis (Ph.D.)-University of KwaZulu-Natal, Pietermaritzburg, 2013.

This dissertation deals with theory and algorithms for computer simulations of classical and quantum systems in the canonical ensemble. First, the approach of Nos e-Hoover and its generalization, known as the Nos e- Hoover chain dynamics, are introduced. Such methods are used in classical molecular dynamics simulations to control the temperature of particle systems through a coupling to a few additional fictitious variables, mimicking an in nite thermal reservoir. In order to introduce the extension of the Nos e-Hoover method to quantum systems, the features of the Wigner representation of quantum mechanics are reviewed. Finally, a recent approach [A. Sergi and F. Petruccione, J. Phys. A 41 355304 (2008)], which extends the Nos e-Hoover and Nos e-Hoover chain equations in quantum phase space, is described. Such a method is applied to a single harmonic mode, and the conditions for quantum-to-classical transitions as a function of the thermodynamical temperature are studied by means of numerical simulations. It is shown that, in the case of strong coupling, the open system dynamics simulated by Nos e-Hoover chain equations leads to quantum-classical transition of the Wigner function of the harmonic mode. Agreement between the numerical and analytical results is also found. The algorithms and results illustrated are of interest to the numerical simulation of the quantum dissipative dynamics of more general systems. / Thesis (M.Sc.)-University of KwaZulu-Natal, Pietermaritzburg, 2011.

Molecular Dynamics (MD) simulations were used in conjunction with the Kirkwood-Buff (KB) theory to compute partial molar volume (PMV) for solutes of various chemical natures. Simulations performed with only the Lennard-Jones (LJ) potential yield PMV for solutes which coincide with the cavity volumes derived from calculations with scaled particle theory (SPT). Whereas, simulations carried out with only the repulsive LJ term produced PMV of solutes closer to their excluded volumes. We also determined the thermal volume, VT, which represents the volume of the effective void created around solutes of varying cavity sizes and applied the spherical approximation of solute geometry to evaluate the thickness of the thermal volume, . Our results reveal an increase in the thickness of thermal volume, , with an increase in the size of the solute. Our theoretical results are in good agreement with the reported empirical schemes for parsing PMV data on small solutes.