Zhang, Yu. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2009. / Includes bibliographical references (leaves 55-60). / Abstract also in Chinese. / Abstract --- p.i / Acknowledgement --- p.iii / Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- Background --- p.1 / Chapter 1.2 --- Aim of Research --- p.2 / Chapter 1.3 --- Thesis Organization --- p.3 / Chapter 2 --- Literature Review --- p.4 / Chapter 2.1 --- Carbon Nanotubes in MEMS Devices --- p.4 / Chapter 2.1.1 --- CNT Integration and CNT sensors --- p.4 / Chapter 2.1.2 --- Prior Work in CMNS --- p.6 / Chapter 2.2 --- Overview of Motion Sensors --- p.7 / Chapter 2.2.1 --- Technology Overview --- p.7 / Chapter 2.2.2 --- Categories and Working Principles --- p.9 / Chapter 2.2.3 --- Application --- p.13 / Chapter 2.3 --- Thermal Convective Motion Sensors --- p.14 / Chapter 2.3.1 --- Micro Thermal Flow Sensors --- p.15 / Chapter 2.3.2 --- Research on Thermal Convective Motion Sensors --- p.17 / Chapter 2.3.3 --- Working Principle and Performances --- p.20 / Chapter 3 --- Design and Setup --- p.25 / Chapter 3.1 --- Methodology --- p.25 / Chapter 3.1.1 --- Research Method --- p.25 / Chapter 3.1.2 --- Critical Questions --- p.26 / Chapter 3.2 --- Sensor Chip Design and Fabrication --- p.27 / Chapter 3.2.1 --- Sensor Chip Mask Design --- p.27 / Chapter 3.2.2 --- Fabrication of Sensor Chip --- p.29 / Chapter 3.3 --- Sensor Prototyping --- p.30 / Chapter 3.3.1 --- CNT Deposition --- p.30 / Chapter 3.3.2 --- Sensor Building --- p.32 / Chapter 3.4 --- Setup of Experiment --- p.34 / Chapter 3.4.1 --- Source and Measure --- p.34 / Chapter 3.4.2 --- Acceleration Production --- p.35 / Chapter 4 --- Experiments and Results --- p.39 / Chapter 4.1 --- Hypotheses Verification --- p.39 / Chapter 4.1.1 --- Thermal Detection Using CNT --- p.39 / Chapter 4.1.2 --- Local Heating & Sensing --- p.40 / Chapter 4.2 --- Tilting Test --- p.42 / Chapter 4.2.1 --- Test Result --- p.42 / Chapter 4.2.2 --- Result Discussions --- p.43 / Chapter 4.3 --- Vibration Test --- p.45 / Chapter 4.3.1 --- Test Result --- p.45 / Chapter 4.3.2 --- Result Discussions --- p.52 / Chapter 5 --- Conclusion --- p.53 / Bibliography --- p.55

Xiao, Peng. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2008. / Includes bibliographical references (leaves 76-78). / Abstracts in English and Chinese. / ABSTRACT --- p.i / 摘要 --- p.iii / ACKNOWLEDGEMENTS --- p.iv / TABLE OF CONTENTS --- p.vi / LIST OF FIGURES --- p.viii / LIST OF TABLES --- p.xi / Chapter CHAPTER ONE --- INTRODUCTION --- p.1 / Chapter 1.1 --- The Thermal Characteristic of the CNT Heater --- p.1 / Chapter 1.2 --- CNT-Based Micro Bubble Generation in a Static Droplet of Water --- p.2 / Chapter 1.3 --- CNT-Based Micro Bubble Transportation in a Micro Channel --- p.4 / Chapter 1.4 --- CNT-Based Micro Bubble Stimulation by Pulsed Current --- p.4 / Chapter CHAPTER TWO --- THE THERMAL CHARACTERISTICS OF CARBON NANOTUBES --- p.6 / Chapter 2.1 --- Temperature Coefficient of Resistance (TCR) of Our Typical CNT Heater --- p.7 / Chapter 2.2 --- The Humidity Coefficient of the Resistance (HCR) for Our Typical CNT Heater --- p.13 / Chapter 2.3 --- The Conclusion of the CNT Heater's Thermal and Humidity Characteristics --- p.18 / Chapter CHAPTER THREE --- MICRO BUBBLE GENERATION WITH MICRO WATT POWER USING CARBON NANOTUBE HEATING ELEMENTS --- p.19 / Chapter 3.1 --- Micro Electrode Fabrication --- p.19 / Chapter 3.1.1 --- Methods for Metal Electrode Fabrication --- p.20 / Chapter 3.1.2 --- Advantages and Disadvantages of Two Micro Fabrication Methods --- p.22 / Chapter 3.1.3 --- The Fabrication of Micro Electrodes for Our CNT Heater --- p.24 / Chapter 3.1.4 --- The Mask Design for Metal Electrode Fabrication --- p.26 / Chapter 3.2 --- The Micro Bubble Generation Experimental Procedure --- p.28 / Chapter 3.2.1 --- Initial Analysis of the Experimental Device --- p.28 / Chapter 3.3 --- Theoretical Analysis of Bubble Generation Temperature on the CNT Heater --- p.31 / Chapter 3.3 --- The Analysis of the Micro Bubble Generation Experimental Results --- p.35 / Chapter 3.4 --- The Conclusion of Bubble Generation in a Static Droplet of Water --- p.44 / Chapter CHAPTER FOUR --- CARBON NANOTUBE-BASED MICRO BUBBLE GENERATION IN A MICRO CHANNEL WITH DYNAMIC FLUID --- p.45 / Chapter 4.1 --- Micro Channel Fabrication --- p.46 / Chapter 4.1.1 --- Rapid Prototyping --- p.46 / Chapter 4.1.2 --- PDMS Moulding --- p.47 / Chapter 4.1.3 --- Irreversible Sealing --- p.49 / Chapter 4.1.4 --- Mask Design --- p.50 / Chapter 4.2 --- Experimental Setup --- p.51 / Chapter 4.3 --- Experimental Procedure --- p.53 / Chapter 4.4 --- Experimental Results --- p.55 / Chapter 4.5 --- Conclusion for Bubble Generation in the Micro Channel with Dynamic Fluid --- p.59 / Chapter CHAPTER FIVE --- CNT-BASED MICRO BUBBLE STIMULATION BY PULSED CURRENT --- p.60 / Chapter 5.1 --- Attempt to Control the Micro Bubble Diameter --- p.61 / Chapter 5.2 --- The Pulsed Current for Micro Bubble Departure in the Micro Channel --- p.63 / Chapter 5.2.1 --- Manual Pulsed Current Stimulation for Micro Bubble Departure in the Micro Channel --- p.64 / Chapter 5.2.2 --- The Pulsed Current Circuit for Micro Bubble Departure in the Micro Channel --- p.67 / Chapter CHAPTER SIX --- FUTURE WORK AND SUMMARY --- p.70 / Chapter 6.1 --- Future Work for Micro Bubble Generation Projects --- p.70 / Chapter 6.1.1 --- The CNT-Based Micro Bubble Generation with Various Values of Input Current --- p.70 / Chapter 6.1.2 --- The CNT Heater in the Zig-Zag Micro Channel --- p.71 / Chapter 6.1.3 --- Summary --- p.72 / APPENDIX A --- p.73 / Fabrication Process --- p.73 / Chapter I. --- Micro Electrode Fabrication --- p.73 / Chapter II. --- Micro Channel Fabrication --- p.75 / BIBLIOGRAPHY --- p.76