Low cycle fatigue is an important valving parameter of materiale which are exposed random alternate strain during their operation. The alternate strain in that material is caused by temperature fluctuations during operation and outages such as aircraft engines. Tests of low cycle fatigue were performed on samples of superalloy Inconel 738LC at stable room temperature at 23°C. The actual experiment took place at certain intervals, consisting of cycling itself, and observing changes in surface relief by light and electron microscopy. There was observed significant surface relief at an early stage of low cycle fatigue. We compared results of measurement with other different observation methods.