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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"anitrogen trifluoride. cplasma etching."" "subject:"anitrogen trifluoride. 8plasma etching.""

1

Plasma etch characteristics of nitrogen trifluoride gas mixtures /

Barkanic, John A., January 2004 (has links)
Thesis (Ph. D.)--Lehigh University, 2004. / Includes vita. Includes bibliographical references (leaves 179-187).
Nitrogen trifluoride. Plasma etching.

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