Due to increase global competitive pressure, shortened product life cycles and ease of imitation, firms must continue to innovate to maintain their competitiveness. Technological innovation has become the primary basis of productivity improvements, sales volume growth, and competitiveness of firms, especially for the high-tech companies. Thus, identification and evaluation of technologies from a variety of perspectives now play important roles in the effective technological sources management. Traditionally, technological innovation studies stressed single model or variable having effects on firm productivity and performance. However, the challenge for business environment is continually changing; single model or variable is not good enough to explain the overall impact of technological innovation. The most difficult aspect of technological innovation performance measurement is the identification of appropriate metrics and approaches that provide information concerning these facets. In this study, the researcher tried to develop a technological innovation performance measurement model and determine tangible and intangible factors from the systematical perspective. That is, technological innovation in its nature is multi-dimensional and multi-criteria. Furthermore, technology innovation performance measurement can be conceptualized as multi-criteria a complex problem which involves the simultaneous consideration of multiple quantitative and qualitative requirements. In this empirical study, the researcher firstly utilizes the Delphi technique to build a hierarchical network structure model for evaluating the technological innovation performance measurement of high tech firms. Secondly, analytic network process (ANP) was applied to determine the importance weights of each dimension and criterion while exists interdependencies among criteria within the same dimension. Thirdly, Non-additive fuzzy integral method was then applied for information fusion and calculates the synthetic performance on a hierarchical network model structure for which criteria are interdependent and interactive. This study applied fuzzy measure and non-additive fuzzy integral method to derive the synthetic performance values of each dimension and firm. Through the technological innovation performance evaluation model can provide firms with an overview of their strengths and weaknesses with regards to technological innovation management. Furthermore, R&D managers and senior managers can apply this model to evaluate and determine the technological innovation capabilities of a firm to improve its technological innovation performance. Finally, this model may provide the useful information for managers and to reduce the overall technological innovation uncertainty.