In this thesis, the details of the design, fabrication, and characterization of an optical, integrated hydrogen gas and temperature sensor are explored. The hydrogen sensor is implemented by coating a ridge waveguide with a thin layer of palladium and shows very good response time and detection response for hydrogen concentrations ranging from 0.5-4%, both of which compare very favourably to similar existing technologies. Multiple film thicknesses were tested and it was found that thinner films give a faster response time at the expense of a reduced detection response. The temperature sensor is implemented with a multi-mode interferometer coupled ring resonator and has a sensing range of 100 K with good sensitivity. Both sensors are fabricated on a silicon-on-insulator platform and could easily be integrated together onto a single chip as part of an optical nose technology that would have the ability to sense multiple environmental factors simultaneously.

In this thesis, the details of the design, fabrication, and characterization of an optical, integrated hydrogen gas and temperature sensor are explored. The hydrogen sensor is implemented by coating a ridge waveguide with a thin layer of palladium and shows very good response time and detection response for hydrogen concentrations ranging from 0.5-4%, both of which compare very favourably to similar existing technologies. Multiple film thicknesses were tested and it was found that thinner films give a faster response time at the expense of a reduced detection response. The temperature sensor is implemented with a multi-mode interferometer coupled ring resonator and has a sensing range of 100 K with good sensitivity. Both sensors are fabricated on a silicon-on-insulator platform and could easily be integrated together onto a single chip as part of an optical nose technology that would have the ability to sense multiple environmental factors simultaneously.