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Hydrogenated Amorphous Silicon Carbide Prepared using DC Saddle Field PECVD for Photovoltaic ApplicationsYang, Cheng-Chieh 04 January 2012 (has links)
Hydrogenated amorphous silicon carbide (a-SiC:H) can provide exceptional surface passivation essential for high-efficiency crystalline silicon solar cells. This thesis reports on the fundamental study of a-SiC:H films deposited using a novel deposition technique, DC saddle field PECVD, in contrast to the conventional industrial use of RF-PECVD. The growth conditions were optimized and correlated with passivating, structural, and optical characteristics. The lifetime has a strong dependency on deposition temperature and improves by over two orders of magnitude as the temperature increases; the maximum lifetime achieved in this work reached 0.5 ms. In addition, the Tauc optical gap can be increased from 1.7 eV to 2.3 eV by varying the precursor gas mixture ratio. Post-deposition annealing experiments demonstrate thermal stability of the samples deposited at 250 °C and in some instances shows improvement in passivation quality by a factor of two with a one-step annealing treatment at 300 °C for 15 minutes.
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Deposition and characterization of nanocrystalline diamond/[beta]-SiC [diamond beta SiC] composite film systemVadali, Venkata Satya Siva Srikanth January 2008 (has links)
Zugl.: Siegen, Univ., Diss., 2008
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Untersuchungen zur plasmagestützten Abscheidung von Schichten auf Stahlfeinblech im Niederdruck bei hohen RatenNikolov, Krasimir January 2008 (has links)
Zugl.: Braunschweig, Techn. Univ., Diss., 2008
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Niedertemperaturabscheidung von Dünnschicht-Silicium für Solarzellen auf KunststofffolienKoch, Christian, January 2003 (has links)
Stuttgart, Univ., Diss., 2003.
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Plasmapolymerisierte Barriereschichten aus einer skalierbaren Mikrowellen-Plasmaquelle für flexible SolarzellenmoduleSchulz, Andreas, January 2005 (has links)
Stuttgart, Univ., Diss., 2005.
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Plasma-unterstützte Herstellung von ÜbergangsmetallnitridenGanin, Alexey, January 2005 (has links)
Stuttgart, Univ., Diss., 2005.
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Entwicklung eines Mehrzonen-Mikrowellen-Plasma-Wirbelschichtverfahrens zur Behandlung von WerkstoffenTap, Roland January 2008 (has links)
Zugl.: Bayreuth, Univ., Diss., 2008
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Realisierung eines Mehrkammer-Depositionssystems zur kontinuierlichen photovoltaischen Beschichtung flexibler SubstrateScholz, Markus. Unknown Date (has links) (PDF)
Universiẗat, Diss., 1999--Siegen.
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Hochratesynthese von Hartstoffschichten auf Siliciumbasis mittels thermischer PlasmenWank, Andreas. Unknown Date (has links) (PDF)
Universiẗat, Diss., 2002--Chemnitz.
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Abscheidung und Charakterisierung von PECVD-AluminiumoxidschichtenKyrylov, Oleksandr. Unknown Date (has links) (PDF)
Techn. Hochsch., Diss., 2003--Aachen.
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