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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
31

Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

Osborn, Brian Philip 28 August 2008 (has links)
Not available / text
32

Aberration sensitivity reduction of alternating phase-shifting mask inphotolithography

Mak, Yick-hong, Giuseppe., 麥易康. January 2004 (has links)
published_or_final_version / abstract / toc / Electrical and Electronic Engineering / Master / Master of Philosophy
33

Dynamic holographic masks for adaptive optical lithography

Bay, Christoph January 2012 (has links)
No description available.
34

Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

Osborn, Brian Philip, Willson, C. G. January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.
35

Photolithography model parameter extraction from in-situ measured development rates /

Drennan, Patrick G. January 1993 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 1993. / Typescript. Includes bibliographical references (leaves 101-103).
36

Developing three-dimensional lithography and chemical lithography for applications on micro/nano photonics and electronics

Yao, Peng. January 2007 (has links)
Thesis (Ph.D.)--University of Delaware, 2007. / Principal faculty advisor: Dennis W. Prather, Dept. of Electrical & Computer Engineering. Includes bibliographical references.
37

Synthesis of low k1 projection lithography utilizing interferometry /

Cropanese, Frank C. January 2005 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 2005. / Typescript. Includes bibliographical references (p. 81-82).
38

Generalized inverse lithography methods for phase-shifting mask design

Ma, Xu. January 2007 (has links)
Thesis (M.E.E.)--University of Delaware, 2007. / Principal faculty advisor: Gonzalo Arce, Dept. of Electrical and Computer Engineering. Includes bibliographical references.
39

Planar lensing lithography : enhancing the optical near field : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /

Melville, David O. S. January 1900 (has links)
Thesis (Ph. D.)--University of Canterbury, 2006. / Typescript (photocopy). "1st of February 2006." Includes bibliographical references (p. [217]-230). Also available via the World Wide Web.
40

Photolithography for the Investigation of Nanostructures

Cothrel, Helen M. 24 April 2015 (has links)
No description available.

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