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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materialsOsborn, Brian Philip 28 August 2008 (has links)
Not available / text
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Aberration sensitivity reduction of alternating phase-shifting mask inphotolithographyMak, Yick-hong, Giuseppe., 麥易康. January 2004 (has links)
published_or_final_version / abstract / toc / Electrical and Electronic Engineering / Master / Master of Philosophy
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Dynamic holographic masks for adaptive optical lithographyBay, Christoph January 2012 (has links)
No description available.
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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materialsOsborn, Brian Philip, Willson, C. G. January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.
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Photolithography model parameter extraction from in-situ measured development rates /Drennan, Patrick G. January 1993 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 1993. / Typescript. Includes bibliographical references (leaves 101-103).
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Developing three-dimensional lithography and chemical lithography for applications on micro/nano photonics and electronicsYao, Peng. January 2007 (has links)
Thesis (Ph.D.)--University of Delaware, 2007. / Principal faculty advisor: Dennis W. Prather, Dept. of Electrical & Computer Engineering. Includes bibliographical references.
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Synthesis of low k1 projection lithography utilizing interferometry /Cropanese, Frank C. January 2005 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 2005. / Typescript. Includes bibliographical references (p. 81-82).
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Generalized inverse lithography methods for phase-shifting mask designMa, Xu. January 2007 (has links)
Thesis (M.E.E.)--University of Delaware, 2007. / Principal faculty advisor: Gonzalo Arce, Dept. of Electrical and Computer Engineering. Includes bibliographical references.
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Planar lensing lithography : enhancing the optical near field : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /Melville, David O. S. January 1900 (has links)
Thesis (Ph. D.)--University of Canterbury, 2006. / Typescript (photocopy). "1st of February 2006." Includes bibliographical references (p. [217]-230). Also available via the World Wide Web.
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Photolithography for the Investigation of NanostructuresCothrel, Helen M. 24 April 2015 (has links)
No description available.
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