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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"photoresists. microlithography folymers."" "subject:"photoresists. microlithography colymers.""

1

Design, synthesis, and optimization of materials for 193 nm and 157 nm photoresists /

Patterson, Kyle William, January 2000 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2000. / Vita. Includes bibliographical references (leaves 178-183). Available also in a digital version from Dissertation Abstracts.
Photoresists. Microlithography Polymers.

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