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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Simulation of force output of piezo-micro-pump

Lin, Nan-kai 02 September 2007 (has links)
Among the MEMS field, the design and simulation of piezoelectric micro-actuators are difficult as compared to thermal micro-actuators and electrostatic micro-actuators. The main reason of the piezo-electric material coupling effect is difficult to calculate. However the piezo-electric material has several advantages and characteristics for designing micro-actuators. Moreover, the design is usually done by the experimental or try-and-error method which is not so effective. It should be noted that there is not a simple method already developed for the design and simulation of the piezo-electric micro-actuators. In this research we proposed to use the software of ANSYS for the simulation of piezo-electric micro-pump. Simulation of force output of piezo-micro-pump can use ANSYS software to establish the simulation system of piezo-micro-pump. The micro-pump will have different resonance frequency, back-pressure and fluid due to piezo-electric characteristic. In this study, the author used a square, rectangle and circle geometric shape to simulate the result, each geometric shape has four different kinds of size. As a result, there are twelve groups of different simulation results. We are able to using the chart to present and explain the relation between resonance frequency and displacement.

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