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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Showing 1 to 2 of 2 (0.108 seconds)

Spelling suggestions: "subject:"cplasma etching emiconductor industry"" "subject:"cplasma etching demiconductor industry""

1

An analysis and development of controls for exposures to maintenance personnel working on the plasma metal etchers

Boysen, Christopher J. January 1998 (has links) (PDF)
Thesis, PlanB (M.S.)--University of Wisconsin--Stout, 1998. / Includes bibliographical references.
Plasma etching Semiconductor industry
2

In situ monitoring of reactive ion etching

Morris, Bryan George Oneal. January 2009 (has links)
Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2010. / Committee Chair: May, Gary; Committee Member: Brand,Oliver; Committee Member: Hasler,Paul; Committee Member: Kohl,Paul; Committee Member: Shamma,Jeff. Part of the SMARTech Electronic Thesis and Dissertation Collection.
Plasma etching. Semiconductor industry.

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