The objectives of the proposed research are to model, optimize, and control variable frequency microwave (VFM) curing of polymer dielectrics. With an increasing demand for new materials and improved material properties, there is a corresponding demand for new material processing techniques that lead to comparable or better material properties than conventional methods. Presently, conventional thermal processing steps can take several hours. A new thermal processing technique known as variable frequency microwave curing can perform the same processing steps in minutes without compromising the intrinsic material properties. Current limitations in VFM processing include uncertain process characterization methods, lack of reliable temperature measuring techniques, and the lack of control over the various processes occurring in the VFM chamber. Therefore, the proposed research addressed these challenges by: (1) development of accurate empirical process models using statistical experimental design and neural networks; (2) recipe synthesis using genetic algorithms; (3) implementation of an acoustic temperature sensor for VFM process monitoring; and (4) implementation of neural control strategies for VFM processing. and #8194;