On-machine inspection (OMI) via on-machine probing (OMP) is a technology that has the potential to provide a step change in the manufacturing of high precision products. Bringing product inspection closer to the machining process is very attractive proposition for many manufacturers who demand ever better quality, process control and efficiency from their manufacturing systems. However, there is a shortness of understanding, experience, and knowledge with regards to efficiently implementing OMI on industrially-based multi-axis machine tools. Coupled with the risks associated to this disruptive technology, these are major obstacles preventing OMI from being confidently adopted in many high precision manufacturing environments. The research pursued in this thesis investigates the concept of enabling high precision machine tools as measurement devices and focuses upon the question of: “How can traceable on-machine inspection be enabled and sustained in an industrial environment?” As highlighted by the literature and state-of-the-art review, much research and development focuses on the technology surrounding particular aspects of machine tool metrology and measurement whether this is theory, hardware, software, or simulation. Little research has been performed in terms of confirming the viability of industrial OMI and the systematic and holistic application of existing and new technology to enable optimal intervention. This EngD research has contributed towards the use of industrial machine tools as traceable measurement systems. Through the test cases performed, the novel concepts proposed, and solutions tested, a series of fundamental questions have been addressed. Thus, providing new knowledge and use to future researchers, engineers, consultants and manufacturing professionals.

This thesis is titled "A Framework for Enhancing the Accuracy of Ultra Precision Machining." In this thesis unwanted relative tool / workpiece vibration is identified as a major contributor to workpiece inaccuracy. The phenomenon is studied via in situ vibrational measurements during cutting and also by the analysis of the workpiece surface metrology of ultra precision diamond face turned aluminum 6061-T6. The manifestation of vibrations in the feed and in-feed directions of the workpiece was studied over a broadband of disturbance frequencies. It is found that the waviness error measured on the cut workpiece surface was significantly larger than that caused by the feed marks during cutting. Thus it was established that unwanted relative tool / workpiece vibrations are the dominant source of surface finish error in ultra precision machining. By deriving representative equations in the polar coordinate system, it was found that the vibrational pattern repeats itself, leading to what are referred to in this thesis as surface finish lobes. The surface finish lobes describe the waviness or form error associated with a particular frequency of unwanted relative tool / workpiece vibration, given a particular feed rate and spindle speed. With the surface finish lobes, the study of vibrations is both simplified and made more systematic. Knowing a priori the wavelength range caused by relative tool / workpiece vibration also allows one to extract considerable vibration content information from a small white light interferometry field of view. It was demonstrated analytically that the error caused by relative tool / workpiece vibration is always distinct from the surface roughness caused by the feed rate. It was also shown that the relative tool / workpiece vibration-induced wavelength in the feed direction has a limited and repeating range. Additionally, multiple disturbance frequencies can produce the same error wavelength on the workpiece surface. Since the meaningful error wavelength range is finite given the size of the part and repeating, study then focussed on this small and manageable range of wavelengths. This range of wavelengths in turn encompasses a broadband range of possible disturbance frequencies, due to the repetition described by the surface finish lobes. Over this finite range of wavelengths, for different machining conditions, the magnitude of the waviness error resulting on the cut workpiece surface was compared with the actual relative tool / workpiece vibrational magnitude itself. It was found that several opportunities occur in ultra precision machining to mitigate the vibrational effect on the workpiece surface. The first opportunity depends only on the feed rate and spindle speed. Essentially, it is possible to force the wavelength resulting from an unwanted relative tool / workpiece vibration to a near infinite length, thus eliminating its effect in the workpiece feed direction. Further, for a given disturbance frequency, various speed and feed rate combinations are capable of producing this effect. However, this possibility exists only when a single, dominant and fixed disturbance frequency is present in the process. By considering the tool nose geometry, depth of cut, and vibrational amplitude over the surface finish lobe finite range, it was found that the cutting parameters exhibit an attenuating or filtering effect on vibrations. Thus, cutting parameters serve to mitigate the vibrational effect on the finished workpiece over certain wavelengths. The filter curves associated with various feed rates were compared. These filter curves describe the magnitude of error on the ultra precision face turned workpiece surface compared with the original unwanted tool / workpiece vibrational magnitude. It was demonstrated with experimental data that these filter curves are physically evident on the ultra precision diamond face turned workpiece surface. It was further shown that the surface roughness on the workpiece surface caused by the feed rate was reduced with relative tool / workpiece vibrations, and in some cases the feed mark wavelength was changed altogether. Mean arithmetic surface roughness curves were also constructed, and the filtering phenomenon was demonstrated over a broadband of disturbance frequencies. It is well established that a decrease in the feed rate reduces the surface roughness in machining. However, it was demonstrated that the improved surface finish observed with a slower feed rate in ultra precision diamond face turning was actually because it more effectively mitigated the vibrational effect on the workpiece surface over a broadband of disturbance frequencies. Experimental findings validated this observation. By only considering the effect of vibrations on the surface finish waviness error, it was shown that the workpiece diamond face turned with a feed rate of 2 {tm / rev has a mean arithmetic surface roughness, Ra , that was 43 per cent smaller than when a feed rate of 10 μm / rev was used. / Thesis / Doctor of Philosophy (PhD)

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Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable. Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine. This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. / Thesis / Master of Applied Science (MASc)