In this study, two different flow field plates, a serpentine field plate and a perforated filed plate, were produced by LIGA-like formation and micro electroforming technology. The two type field plates were also used to make up three different types of micro proton exchange membrane fuel cells (µPEMFCs), serpentine (anode)-serpentine (cathode), serpentine-perforated, and perforated-perforated, each of whose active area is 1 cm2. In addition to the performance tests under different flow rate, operation temperature, and relative humidity conditions, electrochemical impedance spectroscopy (EIS) and cyclic votammetry (CV) methods were also adapted to measure correspondent EIS and Pt utilization of MEA. Even the fuel cell with serpentine field plates in anode and cathode needs more pressure input, the extra pressure is effective to avoid the water accumulation and to raise the total performance.