This diploma thesis is focused on simulation modeling of Roots blowers, which are produced by Kubicek VHS company. First part of this thesis is about oscillations and its damping. In following phase are analyzed each methods realization and control of oscillation damping. Second part of this thesis is focused on Roots blower modelling with rigid and flexible parts and its verification. Output of this thesis is dynamic analysis of Roots blower 3D28C. On attached CD are program annex and project in Adams MSC. Aim of this thesis is proposing adjustments, which would reduce noise and vibration of analyzed machine.

Vacuum technology is ubiquitous in the high tech industries and scientific endeavors. Since vacuum pumps are critical to operation, semiconductor manufacturers desire reliable operations, ability to schedule downtime, and less costly maintenance services. To better cope with difficult maintenance issues, interests in novel fault diagnosis techniques are growing. This study concerns model based fault diagnosis and isolation (MB-FDI) of dry vacuum pumps in the semiconductor industry. Faults alter normal operation of a vacuum pump resulting in performance deviations, discovered by measurements. Simulations using an appropriate mathematical model with suitably chosen parameters can mimic faulty behavior. This research focuses on the construction of a detailed multi-stage dry vacuum pump model for MB-FDI, and the development of a simple and efficient FDI method to analyze common incipient faults such as particulate deposition and gas leak inside the pump. The pump model features 0-D thermo-fluid dynamics, scalable geometric representations of Roots blower, claw pumps and inter-stage port interfaces, a unified pipe model seamlessly connecting from free molecular to turbulent regimes, sophisticated internal leakage model considering true pump geometry and tribological aspects, and systematic assembly of a multi-stage configuration using single stage pump models. Design of a simple FDI technique for the dry vacuum pump includes staged fault simulations using faulty pump models, parametric study of faulty pump behaviors, and design of a health indicator based on classification. The main research contributions include the developments of an accurate multi-stage dry pump model with many features not found in existing pump models, and the design of a simple MB-FDI technique to detect and isolate the common faults found in dry vacuum pumps. The proposed dry pump model can pave the way for the future development of advanced MB-FDI methods, also performance improvement of existing dry vacuum pumps. The proposed fault classification charts can serve as a quick guideline for vacuum pump manufactures to isolate roots causes from faulty symptoms. / text

The Master‘s thesis deals with issues of noise and vibrations of Roots blowers. In the theoretical part, potential sources of noise and vibrations are described. Detailed knowledge of basic types of mufflers is summarized, and their suitability for the corresponding application is evaluated. The practical part is focused on performing experimental measurements of the Roots blower’s noise and vibrations and the main sources of noise are determined. Subsequently, the existing anti-noise measures are analyzed and the proposal for adjusting the current measures for further noise reduction is presented.

This thesis is concerned with vibration analysis of the roots blower chassis. In the beginning it describes methods of solution in low frequency region. Next part is about finite element model of the chassis and computing natural frequencies, eigen modes and vibration spreading and analysis possible construction changes which should lead to lower vibrations.