There were three poly-Si TFT made by ELA, SLS, and HREC. The HREC TFT had better reliability than ELA TFT and SLS TFT under AC and hot carrier stress. And the effect of bending in SLS TFT was more obvious then ELA TFT, it provide us a better choose to develop a flexible TFT LCD. In poly-Si TFT, the photon current would decrease if there was a grain boundary in the channel. In all parameters include both manufacture and measurement the HREC TFT had better behaviors than ELA TFT and SLS TFT. But there also some shortcomings we must overcome include we muse growth a heat-retaining layer extra and must etch it and the poly-Si/heat-retaining etch rate and so on.