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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"semiconductor fault detection"" "subject:"emiconductor fault detection""

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An Enhanced Approach using Time Series Segmentation for Fault Detection of Semiconductor Manufacturing Process

Tian, Runfeng 28 October 2019 (has links)
No description available.
Mechanical Engineering
Semiconductor fault detection
Time series segmentation
Feature extraction

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