京都大学 / 0048 / 新制・論文博士 / 博士(農学) / 乙第12762号 / 論農博第2785号 / 新制||農||1016(附属図書館) / 学位論文||H25||N4785(農学部図書室) / 30614 / (主査)教授 奥村 正悟, 教授 中野 隆人, 教授 吉村 剛 / 学位規則第4条第2項該当 / Doctor of Agricultural Science / Kyoto University / DFAM

This project is aimed at semiconductive gas sensors based on tin dioxide. In the first part, gas sensors are divided depending on their principal of functionality. Next part is about functionality of tin dioxide gas sensors and the possibilities of active layer modification. Experimental describes gas sensor from its drawing until construction, testing and characterization. Several microelectronic technologies such as thin-film, thick-film, LTCC, spray-coating or wire-bonding were used for constructing the sensor. In the last part properties of gas sensors and differences in functionality between modified and unmodified gas sensor are summarized.