Global ETD Search

About
The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

1	Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes Firth, Stacy Kay. January 2002 (has links) Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company. Semiconductors Semiconductor industry
2	Energy analysis, diagnostics, and conservation in semiconductor manufacturing Mardikar, Yogesh Mukesh. January 2004 (has links) Thesis (M.S.)--West Virginia University, 2004. / Title from document title page. Document formatted into pages; contains viii, 152 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 106-108). Semiconductors Semiconductor industry
3	Run-to-run control of overlay and linewidth in semiconductor manufacturing Bode, Christopher Allen, January 2001 (has links) Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references (leaves 164-176). Available also in a digital version from Dissertation Abstracts.
4	Adaptive run-to-run control of overlay in semiconductor manufacturing Martinez, Victor Manuel. January 2002 (has links) (PDF) Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.