The widespread use of Liquid Petroleum Gas (LPG) for cooking and as fuel for automobile vehicles requires fast and selective detection of LPG to precisely measure the leakage of gas for preventing the occurrence of accidental explosions. The adoption of Micro-Electro-Mechanical-System (MEMS) technology for fabricating the gas sensor provides other potential advantages for sensing applications, which includes low power consumption, low fabrication cost, high quality, small size and reliability. MEMS based gas sensor requires a sensitive layer of oxide material like ZnO, SnO2, TiO2, Fe2O3, etc. The tin oxide material used in the present work changes its electrical properties, as it interacts with the reducing gas like LPG. The sensor material becomes active only at high temperature such as 400ºC, thereby realizing the need of a micro heater to reach the desired temperature. To control the temperature of micro heater and to determine the change in electrical properties of the sensor due to its interaction with LPG an Application Specific Integrated Circuit (ASIC) forms an essential constituent of the MEMS based gas sensor. In the present work, an attempt has been made to improve the sensitivity of LPG gas sensor and it is correlated with other properties by different characterization techniques. The work also includes the design as well as testing of ASIC for gas sensor system. Process parameters particularly deposition time and substrate temperature have a profound influence on the microstructure of the tin oxide film, which in turn affects the gas sensing properties. To study the effects of these parameters, RF magnetron sputtering system is used for depositing tin oxide films onto the silicon substrate, which is compatible with CMOS technology. The effects of structural properties, optical properties and the porosity of the films are also studied and correlated with the gas sensing properties. In this direction the deposited films are characterized using X-Ray Diffraction (XRD) to determine the structure orientation. The morphology of the sensor films are analyzed by Scanning Electron Microscope (SEM) while the refractive index, thickness and porosity of the films are determined using ellipsometry studies. The thickness of the deposited films is also confirmed by the surface profilometer. The change in composition of the deposited film along its depth is determined using Secondary Ion Mass Spectrometer (SIMS). Maximum sensitivity 5.5 is obtained for 470 nm thick films, which corresponds to a grain size of 38nm at the operating temperature of 4000C. Following these studies, an ASIC has been designed using Tanner EDA Tools on AMIS 0.7 µm CMOS process, fabricated through Euro practice’s ASIC prototyping service, Belgium and tested successfully after fabrication. The temperature control module of ASIC has been designed using relaxation oscillator technique to control the temperature of the in house developed heater. The resistance to period conversion technique is explored for the design of the sensor read out module of ASIC. The heater is integrated successfully with the sensor film, ASIC and microcontroller based LCD module. The test results show good agreement with the simulation results.

Current gas sensor technology, although meeting the minimum requirements in many instances, suffers for a number of limitations. Hence, there is currently a considerable volume of research being undertaken at many laboratories of different countries. In the past, all chemical sensors and catalyst were optimized empirically by a trial and error method. Today, however, systematic research and development is becoming increasingly important in order to improve sensors and to find new sensing principles. Obtaining a long term stable gas sensor with improved sensitivity, selectivity, and low cost for mass production passes through fundamental research and material characterization to build new chemically sensitive devices or to improve existing ones. The bottom line in the design and manufacture of modern gas sensors is the transfer from ceramic(of Figaro type) to thin film gas sensors(TFGs). This transfer provides new opportunities for further microminiaturization, power consumption and cost reduction of gas sensors. Therefore, at the present time, thin film gas sensors are the basis for the design of the modern gas sensitive multi-parameter microsensor systems. Applications of these systems include environment, security, home systems, smart buildings, transportation, discrete manufacturing, process industries and so on. Microelectromechanical systems(MEMS) based integrated gas sensors present several advantages for these applications such as ease of array fabrication, small size, and unique thermal manipulation capabilities. MEMS based gas sensors; which are usually produced using a standard CMOS(Complimentary Metal Oxide Semiconductor) process, have the additional advantages of being readily realized by commercial foundries and amenable to the inclusion of on-chip electronics. In order to speed up the design and optimization of such integrated sensors, microheater designs for gas sensor applications have been presented as first part of the present thesis. As heater design is the key part for a gas sensor operation. So 3D simulations have been used to optimize micro-heater geometry. The application of MEMS Design Tool(COVENTORWARE) has been presented to the design and analysis of micro-hotplate (MHP) structures. Coupled Electro-thermal analysis provided an estimation of thermal losses and temperature distribution on the hotplate for realistic geometrical and material parameters pertinent to fabrication technology. Five microheater designs have been proposed in terms of different sizes and shapes in order to optimize the microhotplate structure to be used for gas sensor operation for the specified range of temperature and power consumption. To produce a gas sensor, which is able to detect LPG leak, thin films of tin oxide have been developed. FR sputtering has been used to deposit gas sensitive tin oxide thin filmls under various deposition conditions. Four different values of pressure in the range from high pressure(5 X 10-2 mbar) to lower pressure (2 X 10-3 mbar), three RF power values 50, 75, 100 W and varied oxygen percentage in sputtering atmosphere (0-18%) have been used to optimize the material properties of tin oxide thin films to study the sensitivity towards LPG. All the samples have been analyzed using various macro and microscopic characterization techniques. Extensive studies have been done on the sensor response for the samples deposited under different conditions. Finally the sample film deposited at 5 x 10-3 mbar, with applied power of 75 W in the presence of 8% oxygen, showed maximum sensitivity towards LPG.