Shape memory alloys (SMAs) have been recognized as one of the most promising materials for MEMS micro-actuator applications. Among the available materials, Nickel/Titanium (NiTi) SMAs are more popular because, they exhibit unique properties in shape memory effect (SME) and pseudo-elasticity (PE). In addition NiTi SMA possesses high corrosion resistance, excellent mechanical properties and is also bio¬compatible. NiTi thin-film SMAs have been considered as the most significant material in the field of MEMS applications, which can be patterned with standard lithographic techniques to scale-up for batch production. However, the lack of proper understanding of basic materials’ properties and inability to reproduce, has limited the usage of this material in MEMS devices. The properties of NiTi SMA thin-films are very much sensitive to the elemental composition and structure, which are in turn decided by the deposition process and process parameters. A brief history of NiTi shape memory alloys (SMAs), basic information, transformation characteristics, crystal structure, phase diagram and literature reviewed for the current motivation have been presented in the second chapter In the third chapter, a brief summary about the deposition techniques relevant to NiTi film deposition has been presented. The deposition of NiTi films by a number of deposition techniques such as thermal evaporation, co-evaporation, molecular beam Epitaxy, pulsed laser deposition, flash evaporation, electron beam deposition, filtered arc deposition, ion beam assisted sputter deposition, vacuum plasma spraying, ion beam sputtering, ECR sputtering and magnetron sputtering techniques have been discussed. In order to achieve a precise control over film thickness and composition of the films on to the substrates, the selection of magnetron sputtering has been highlighted. In the present thesis, two prolonged approaches such as DC magnetron sputtering of an alloy target and co-sputtering of elemental targets have been presented. Various characterization techniques used for film thickness, composition, structure, micro¬structure, electrical, phase transformation and mechanical properties have also been briefly presented in the same chapter. In the fourth chapter, description of Conventional Alloy Target Sputtering System has been presented. DC magnetron sputtering of an alloy target with two different atomic ratios (Ni:Ti = 45:55 & 50:50) has been used for depositing the coatings. Several limitations in the reproducibility and repeatability have been observed with single alloy target sputtering, irrespective of the target composition ratio. In addition to this, incorporation of oxygen in the films during and after deposition has been observed, which has limited the extensive usage of this single alloy target system. The limitations regarding control over composition, thickness uniformity over large area have been improved by designing and fabricating a dedicated Three Target Magnetron Co-sputtering System. The vacuum diagnosis of the system under different conditions has been carried out by using PPR-200 Residual Gas Analyzer (RGA), which have included in Appendix I. Similar to alloy target sputtering system, the thickness uniformity and required composition with deposition parameters over a size of 75 mm diameter has been achieved and the process repeatability has been established. Oxygen incorporation in the films during deposition has been minimized by pre-sputtering of Ti target for known duration of time, which has resulted in significant reduction in partial pressure of oxygen in the chamber. The oxide layer formation on film surface has been eliminated by in-situ capping layer (TiN) deposition. In the fifth chapter, the influence of process parameters such as sample locations, substrate to target distance (STD), working pressure (WP), gas flow rates, deposition rates, deposition and annealing temperature, Target power, on the film thickness and composition uniformity have been presented for alloy target sputtering system as well as for the co-sputtering system. The film thicknesses have been measured with stylus method. Film compositions have been determined by energy dispersive X-ray spectroscopy (EDS), Secondary ion mass spectrometry (SIMS), Rutherford backscattering spectrometry (RBS) and X-ray photoelectron spectroscopy (XPS). The working pressure of 1.5 X 10-3 mbar, STD of 90 mm and target power of 100 W have been found to produce coatings having uniform thickness and composition over the given area for alloy target sputtering system. Similar investigations have been carried out for co-sputtered NiTiCu films. The working pressure of 1.5x 10-3 mbar, at a STD of 90 mm, at a rotational speed of 15 rpm and at target powers of 600, 50 and 12 W for Ti, Ni and Cu respectively, have resulted in the thickness and required composition uniformity over a size of 75 mm diameter substrate and the process repeatability has been established. In the Sixth chapter, the influence of process parameters on film structure and micro-structure on the NiTi/NiTiCu films deposited by a single alloy target and co¬sputtering have been studied by different analytical techniques like XRD, TEM, AFM, SEM etc. Phase transformation temperatures and kind of transformations have been investigated by DSC, Resistivity / Temperature and Stress/ Temperature studies and correlations have been established. The process parameters have been optimized for TiN deposition, which act as the capping layer to protect NiTi films from surface oxidation. The variation in mechanical behavior for the NiTi/ NiTiCu films before and after TiN capping by nano-indentation test have also presented. XRD and TEM studies have shown that the NiTi / NiTiCu films deposited at room temperature to 400o C are amorphous. Post-annealing, at a temperature of 450O C or above resulted in the film crystallization with oxide layer formation at the film surface, which has been confirmed by XRD and XTEM studies. In the case of Ni-rich NiTi films, R-phase diffraction peaks have also been identified in addition to the Austenite / Martensite phase. XRD investigations have shown that Ti-rich NiTi and Ni-rich NiTi films have resulted in precipitate free films. In the case of Ti-rich NiTiCu and Ni-rich NiTiCu films, the variations in Ti/Ni target power has resulted in the formation of NiTi 2 and Ni3Ti precipitates along with their parent Martensite and Austenite phases. When the Cu content is increased in NiTiCu films, an increase in number of Martensite phase diffraction peaks in XRD spectrum has been observed. XTEM studies have confirmed formation of oxide layer, inter-metallic layer and interface layer at higher post annealing temperatures. SEM studies have shown that the films deposited at higher gas flow rate results in the columnar micro-structure. In the context of NiTiCu films, the films deposited at higher Ti target power have shown more compact and tightly packed film micro-structure. AFM studies have shown increase in the average crystallite size and film roughness with post annealing temperature and duration. TiN coating has been used as the capping layer onto NiTi / NiTiCu films. Structural and micro-structural comparison of these films before and after TiN coating has resulted the appearance of (111) TiN peak in all TiN capped films. SEM and AFM studies have shown that the film roughness have decreased after capping layer deposition. DSC thermal cycling used to verify the film crystallization temperature has shown the appearance of exothermic peak in NiTi / NiTiCu films. DSC, Resistivity-temperature, stress-temperature response has been confirmed the transformation temperature and kind of transformations in all the films. Residual stress measurements have shown that the crystalline films exhibited lower bi-axial stress in comparison to the amorphous films. Ti-rich NiTi films have shown single phase transformations (M-A and A-M) whereas two phase transformations (M-R-A and A-R-M) have been observed in Ni-rich NiTi films. Higher deposition / annealing temperature have shown the appearance of distinct phase transformation peaks in resistivity vs. temperature studies. In the case of NiTiCu films, the decrease in film crystallization temperature with increase in the Cu content has been observed. The phase transformation temperature evaluated from second thermal cycle has shown decrease in the width of hysteresis loop with increase in the Cu content in NTC films. Nano-indentation studies have been carried out to evaluate the micro-hardness and modulus values of TiN capped and uncapped NiTi / NiTiCu films. The modulus and hardness uniformity have been confirmed for the different location over a diameter of 75 mm. The modulus and hardness values have increased with increase in the substrate and annealing temperature. Increase in the Cu target power has resulted in the increase in the hardness and modulus values under same deposition conditions. TiN coated NiTi / NiTiCu films have shown larger modulus and hardness values than the uncapped films. In the Seventh chapter, the fabrication process and actuation response for silicon dioxide, Aluminum and NiTi SMA coated micro-cantilevers has been discussed. Various nano-structures such as pyramids, beams and pillars by focused ion beam (FIB) micro-machining have been fabricated. High aspect ratio nano-pillars have been selected for micro-compression testing. In summary, this thesis emphasizes on the fabrication of specific sputtering systems relevant to NiTi film deposition and process parameter optimization for desired film thickness and composition uniformity. DC magnetron sputtering of a NiTi alloy target (50:50 and 45:55 at. %) and co-sputtering of elemental targets (Ni, Ti and Cu) have been presented. These films have been investigated for structural, micro-structural, phase transformation and mechanical properties. In-situ deposition of TiN capping layer, on to NiTi / NiTiCu films has been carried out to reduce the oxygen trapping. The fabrication process and actuation response of micro-cantilevers have been described. The etching characteristics to generate various nano-structures viz. pyramids, beams and pillars by focused ion beam (FIB) micro-machining have been investigated and mechanical testing of selected nano-structures have also been reported.

Les Alliages à Mémoire de Forme Magnétiques (AMFM) sont des matériaux actifs qui présentent des comportements inhabituels par rapport aux matériaux " classiques ". Ils peuvent par exemple présenter de larges déformations réversibles sous l'action d'un champ magnétique ou sous une action mécanique. Ce sont des candidats potentiels pour des applications dans des domaines de pointe (automobile, aéronautique, spatial, etc.). Les AMFM présentent par ailleurs un avantage indéniable par rapport aux matériaux à mémoire de forme " thermique " en raison de leur réponse dynamique à haute fréquence. Il est bien connu que ces comportements sont dus à un couplage magnéto-mécanique et à un phénomène physique lié à l'orientation des variantes de martensite. L'objectif de cette thèse est d'analyser les comportements magnéto-mécaniques des AMFM. Pour ce faire, nous étudions expérimentalement et théoriquement, la réorientation martensitique dans les AMFM. Tout d'abord, une analyse énergétique en 2D/3D est proposée et intégrée dans des diagrammes d'état pour une étude systématique de la réorientation martensitique dans les AMFM sous chargements tridimensionnels quelconques. Ainsi, des critères de large déformation réversible sous des chargements cycliques sont obtenus. L'analyse énergétique montre que les AMFM, sollicités sous chargement multiaxiaux présentent plus d'avantages que ceux sollicités en 1D ; en particulier, on montre que l'état multiaxial permet d'augmenter (d'améliorer) la contrainte fonctionnelle, ce qui augmente le champ d'application des ces matériaux. Ensuite, afin de valider les prédictions de l'analyse énergétique, des expériences bi-axiales ont été effectuées sur des éprouvettes en AMFM. Les résultats révèlent que la dissipation intrinsèque et la déformation de transformation dues à la réorientation martensitique sont constantes dans tous les états de contraintes. De plus, les résultats ont permis de valider nos prédictions théoriques quant à l'augmentation de la contrainte fonctionnelle. Enfin, afin de prédire les comportements magnéto-mécaniques des AMFM sous des chargements multiaxiaux, un modèle tridimensionnel est développé dans le cadre de la thermodynamique des processus irréversibles avec liaison interne. Toutes les variantes de martensite ont été considérées et l'effet de température a également été pris en compte. Les simulations numériques montrent un très bon accord (rejoignent/confirment les résultats) avec les résultats expérimentaux existant dans la littérature. Le modèle a ensuite été programmé dans un code de calcul par éléments finis afin d'étudier les comportements non linéaires de flexion des poutres en AMFM. L'effet géométrique et l'effet d'anisotropie du matériau ont été systématiquement pris en compte.

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The thesis is devoted to study of continuum mechanics and thermodynamics and the related mathematical analysis. It consists of four self-contained chapters dealing with different aspects. The first chapter focuses on peridynamics, a non-local theory of continuum mechanics, and its relation to conventional local theory of Cauchy-Green elasticity. Similar compar- isons has been used for proving consistency and for determining some of the material coefficients in peridynamics, provided the material parameters in the local theory are known. In this chapter the formula for the non-local force-flux is computed in terms of the peridynamic interaction, relating the fundamental concepts of these two theories and establishing hence a new connection, not present in the previous works. The second and third chapters are both devoted to Rate-Independent Systems (RIS) and their applications to continuum mechanics. RIS represents a suitable approximation when the internal, viscous, and thermal effects can be neglected. RIS has been proven to be useful in modeling hysteresis, phase transitions in solids, elastoplasticity, damage, or fracture in both small and large strain regimes. In the second chapter the existence of solutions to an evolutionary rate-independ- ent model of Shape Memory Alloys (SMAs) is proven. The model...

Pseudoelastic NiTi shape memory alloys exhibit different stress–strain curves and modes of deformation in tension vs. compression. We have recently shown that under a combination of compression and shear, heterogeneous deformation can occur. In the present study, we use digital image correlation to systematically analyze how characteristic features of the nominally uniaxial engineering stress–strain curves (particularly the martensite nucleation peak and the plateau length) are affected by extensometer parameters in tension, compression, and the novel load case of shear-compression. By post-experimental analysis of full surface strain field data, the effect of the placement of various virtual extensometers at different locations (with respect to the nucleation site of martensite bands or inhomogeneously deforming regions) and with different gauge lengths is documented. By positioning an extensometer directly on the region corresponding to the nucleating martensite band, we, for the first time, directly record the strain-softening nature of the material—a specific softening behavior that is, for instance, important for the modeling community. Our results show that the stress–strain curves, which are often used as a basis for constitutive modeling, are affected considerably by the choice of extensometer, particularly under tensile loading, that leads to a distinct mode of localized deformation/transformation. Under compression-shear loading, inhomogeneous deformation (without lateral growth of martensite bands) is observed. The effects of extensometer gauge length are thus less pronounced than in tension, yet systematic—they are rationalized by considering the relative impact of differently deforming regions.

PhD thesis focuses the field of textile application of modern functional materials, namely metallic shape memory alloys with unique thermomechanical properties deriving from martensitic transformation in solid state. Particularly, it deals with the development of a nonconventional thermomechanical treatment of thin NiTi filaments via Joule heating by electric current and related basic research involving thermomechanical testing and modeling of functional properties of the filaments, investigation of martensitic transformations and deformation processes in NiTi and investigation of the fast recovery and recrystallization processes in metals heated by short pulses of controlled electric power. The method was developed and called FTMT-EC. In contrast to conventional heat treatment of metallic filaments in environmental furnaces, this method allows for precise control of the raise of the filament temperature and filament stress during the fast heating (rate ~50 000 °C/s). As a consequence, it is possible to precisely control the progress of the fast recovery and recrystallization processes in heat treated filaments. In this way it is possible to prepare filaments with desired nanostructured microstructure and related functional properties. A prototype equipment for application of the method for heat treatment of continuous SMA filaments during respooling in textile processing was designed and built. Comparing to the conventional heat treatment of SMA filaments in tubular environmental furnaces, this approach is faster, saves energy and allows for preparation of filaments with special functional properties. International patent application was filed on the method. It is currently utilized in the research and development of smart textiles for medical applications.

A novel, environmentally friendly, fast, and flexible polishing process for Nitinol parts is presented in this study. Nitinol samples with both superelastic and shape memory properties at room temperature were investigated. The chemical contamination and surface roughness of superelastic Nitinol plates were examined before and after plasma electrolytic polishing. The shift in phase transformation temperature and tensile strength before and after the polishing process were analysed using Nitinol wire with shape memory properties. The obtained experimental results were compared to the data obtained on reference samples examined in the as-received condition. It was found that plasma electrolytic polishing, when the right process parameters are applied, is capable of delivering Nitinol parts with extremely high surface quality. Moreover, it was experimentally proven that plasma electrolytic polishing does not have a negative impact on functionality or mechanical properties of polished parts.