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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"SiC ono insulation substrate"" "subject:"SiC onn insulation substrate""

1

SiC Thin-Films on Insulating Substrates for Robust MEMS-Applications

Chen, Lin 16 May 2003 (has links)
No description available.
SiC on insulating substrate
LPCVD
ICP etching
MEMS
Fabry-Perot Interferometer

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