Angular distributions and total yields of atoms sputtered from bismuth targets by normally incident 10 keV -50 keV Ne+ and Ar+ ions have been measured both experimentally and by computer simulation. Polycrystalline Bi targets were used for experimental measurements. The sputtered atoms were collected on high purity aluminum foils under ultra-high vacuum conditions, and were subsequently analyzed using Rutherford backscattering spectroscopy. The Monte-Carlo based SRIM code was employed to simulate angular distributions of sputtered Bi atoms and total sputtering yields of Bi to compare with experiment. The measured sputtering yields were found to increase with increasing projectile energy for normally incident 10 keV - 50 keV Ne+ and Ar+ ions. The shapes of the angular distributions of sputtered Bi atoms demonstrated good agreement between experiment and simulation in the present study. The measured and simulated angular distributions of sputtered Bi exhibited an over-cosine tendency. The measured value of the degree of this over-cosine nature was observed to increase with increasing incident Ne+ ion energy, but was not strongly dependent on incident Ar+ ion energy. The differential angular sputtering yield and partial sputtering yields due to Ar ion bombardment of an inhomogeneous liquid Bi:Ga alloy have been investigated, both experimentally and by computer simulation. Normally incident 25 keV and 50 keV beams of Ar+ were used to sputter a target of 99.8 at% Ga and 0.2 at% Bi held at 40° C in ultra-high vacuum (UHV), under which conditions the alloy is known to exhibit extreme Gibbsian surface segregation that produces essentially a monolayer of Bi atop the bulk liquid. Angular distributions of sputtered neutrals and partial sputtering yields obtained from the conversion of areal densities of Bi and Ga atoms on collector foils were determined. The Monte-Carlo based SRIM code was employed to simulate the experiment and obtain the angular distribution of sputtered components. The angular distribution of sputtered Ga atoms, originating from underneath the surface monolayer, was measured to be sharply peaked in angle about the surface normal direction compared to the Bi atoms originating from surface monolayer. The simulation study produced contradicting results, where the species originating from surface monolayer was strongly peaked around the surface normal compared to the species originating from beneath the surface monolayer.

Title: Sputtering of dust grains and its consequences for space processes Author: Marek Vyšinka Department: Department of Surface and Plasma Science Supervisor: prof. RNDr. Jana Šafránková, DrSc., Department of Surface and Plasma Science Abstract: A great part of matter in a space has a form of dust grains, tiny pieces of rocks with the dimensions of hundreds nanometers to hundreds micrometers. In this environment dust grains undergo collisions with energetic particles (electron, ions, UV photons) that leads to their charging and modification. The presented thesis studies ion-dust interactions and is focussed on dust grain modification through ion implantation and its destruction via sputtering process. Two compu- ter models are presented - first for computing the ion implantation profile in the grain and second, for the shape of the sputtered grain lying on the surface of a bigger object. The resulting shape of the grain is compared with that obtained experimentally. Important results of the thesis are measured sputtering yields for spherical SiO2 grains at several surface potentials obtained by simultaneous ion and electron bombardments. Keywords: ions, dust grains, sputtering, sputtering yield, implantation profile 1

SIMS est une technique d'analyse sensible de la surface. La probabilité d'ionisation dépend de l'état chimique de la surface. La génération des ions positifs est améliorée par le bombardement de la surface avec des éléments électronégatifs.Sur le NanoSIMS 50 de CAMECA, dont la configuration optique nécessite une polarité opposée entre ions primaires et secondaires, l'analyse des ions positifs se fait sous bombardement d'ions O-, générés dans un duoplasmatron. La faible brillance de la source en mode O- a comme conséquence une faible résolution latérale des analyses. Pour y remédier, nous avons étudié la possibilité de générer d’autres faisceaux d’ions primaires négatifs. Dans cet objectif, nous avons étudié la génération par duoplasmatron d'ions F-, Cl-, Br- et I- en fonction du champ magnétique, du courant d'arc et de la pression totale des gaz. Le courant d'ions et le diamètre du faisceau ont été mesurés afin de déterminer la brillance de la source en mode F-, Cl-, Br- et I-. Une brillance 5 fois plus élevée en mode F- qu'en mode O- a été déterminée.En utilisant les faisceaux F-, Cl-, Br- et I-, le rendement de pulvérisation, la concentration d'ions primaires implantés et le rendement utile ont été mesurés pour des semi-conducteurs et des métaux. Suite à une faible concentration en halogène à la surface des semi-conducteurs, résultant des processus de décapage, le rendement utile sous bombardement halogène était plus faible que sous bombardement O-. Pour les métaux (p.ex. Ni, Cu et Ag) par contre, une amélioration du rendement utile sous bombardement halogène jusqu'à deux ordres de grandeurs, comparé au bombardement O-, a été mesurée / Secondary Ion Mass spectrometry (SIMS) is a powerful surface analysis technique. The ionisation probability strongly depends on the chemical surface state. The generation of positive secondary ions can be enhanced by surface bombardment with electronegative elements.Due to the optical configuration of the CAMECA NanoSIMS 50, that necessitates an opposite polarity of incoming and ejected ions, analyses of positive ions are realized with primary O- ions, generated in a duoplasmatron ion source. As a consequence of the low O- brightness of the duoplasmatron source, the lateral resolution of the analyses on the NanoSIMS 50 is not satisfactory in the positive secondary mode. In this work, we studied the feasibility of different alternative negative primary ion beams. We investigated the possibility of F-, Cl-, Br- and I- ion generation with a duoplasmatron as a function of the source parameters, notably the magnetic field strength, the arc current and the total gas pressure. The ion current and the beam diameter were measured in order to determine the F-, Cl-, Br- and I- brightness of the source. A comparative study with the O- brightness demonstrates an increase of the F- brightness by a factor of 5.By using the F-, Cl-, Br- and I- bombardment, the sputtering yield, the concentration of implanted primary ions and the useful yield of different semi-conductor and metal samples were analysed. As a consequence of a low halogen concentration, related to etching effects, no enhancement of the useful yield could be noticed for the semi-conductors. For metals however (e.g. Ni, Cu and Ag), useful yield enhancements by up to a factor of 100 compared to the O- bombardment could be demonstrated