Electron-excited surface plasmon resonance (eSPR) is investigated for potential use in biosensors. Optical SPR sensors are commercially available at present and these sensors are extremely sensitive, but have the tendency to be relatively large, expensive, and ignore the potentials of microelectronic technology. By employing the use of various microelectronic and nanotechnology principles, the goal is to eventually design a device that exploits the eSPR phenomenon in order to make a sensor which is siginificantly smaller in size, more robust, and cheaper in cost.