The demand of modern technology is highly required by humans. The Linear motor, one of the most significant inventions, has been playing a vital role in driving component. The Structure of the gantry is the main design and the requirement of high bandwidth and rigidity. Twin-linear motors coupled and paralleled with machining beam are to realize one degree-movement. To prevent the marching beam from deformation, the synchronized motion control becomes an important technology for this machine. This thesis solves the problem of the mechanism coupling by using of the synchronized master command approach which integrates the decouple control and internal model control and taking the mechanism beam as an uncertainty. Both system uncertainties and unknown disturbances occurring in actual implementation need to be carefully considered. And the synchronized motion control of the two linear servo systems with mechanism will be investigated. Better synchronization performance for two motors can therefore be anticipated.

Coordinated or synchronized tasks can always be found in various manufacturing processes, e.g., machining along spatial trajectories, coordinated operations of multi-manipulators, and vacuum pumps, etc. The vacuum pump is a typical device with synchronized motion among those examples. The vacuum pump has played an important role in current semiconductor manufacturing processes. Its pumping feature is achieved by synchronized motion of two mating pump rotors. A common approach to accomplish the synchronized motion is by idle gears. Nevertheless, this design cannot meet serious requirements of vacuum systems demanded by growing manufacturing techniques. In order to provide a complete and proper control strategy for synchronized motion, and to overthrow traditional architecture of vacuum pumps by raising a better control scheme for new generation oil-less products, the paper focuses on synchronized motion control for dual motors. The first objective of here is to develop a control method for synchronized motion of two separated motors. Both system uncertainties and unknown disturbances occurring in actual implementation need to be carefully considered. An experimental setup will also be established for examinations and verifications. And then synchronized motion control of dual motors including two mating screw rotors then will be investigated. During this period, the emphasis will be on solution finding for unexpected contact collision between two rotors. An effective and efficient control strategy will be developed for synchronized motion control of dual motors. Longer operation time and better synchronization performance for two motors can therefore be anticipated.

Abstract Coordinated or synchronized tasks can always be found in various manufacturing processes, e.g., machining along spatial trajectories, coordinated operations of multi-manipulators, and vacuum pumps, etc. The vacuum pump is a typical device with synchronized motion among those examples. The vacuum pump has played an important role in current semiconductor manufacturing processes. Its pumping feature is achieved by synchronized motion of two mating pump rotors. A common approach to accomplish the synchronized motion is by idle gears. Nevertheless, this design cannot meet serious requirements of vacuum systems demanded by growing manufacturing techniques. In order to provide a complete and proper control strategy for synchronized motion, and to overthrow traditional architecture of vacuum pumps by raising a better control scheme for new generation oil-less products, the paper focuses on synchronized motion control for dual motors. The first objective of here is to develop a control method for synchronized motion of two separated motors. Both system uncertainties and unknown disturbances occurring in actual implementation need to be carefully considered. An experimental setup will also be established for examinations and verifications. And then synchronized motion control of dual motors including two mating screw rotors then will be investigated. During this period, the emphasis will be on solution finding for unexpected contact collision between two rotors. An effective and efficient control strategy will be developed for synchronized motion control of dual motors. Longer operation time and better synchronization performance for two motors can therefore be anticipated.