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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"tk7855.141 343 no.565"" "subject:"tk7855.141 443 no.565""

1

Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

January 1991 (has links)
Kathleen R. Early. / Includes bibliographical references (p. 155-163). / Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806
TK7855.M41 R43 no.565

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