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Experimental investigation of size effect on thermal conductivity for ultra-thin amorphous poly(methyl methacrylate) (PMMA) filmsKim, Ick Chan 15 May 2009 (has links)
An investigation was conducted to determine whether a “size effect”
phenomenon for one particular thermophysical property, thermal conductivity, actually
exists for amorphous poly(methyl methacrylate) (PMMA) films with thicknesses ranging
from 40 nm to 2 μm. This was done by using a non-contact, non-invasive, in-situ
Transient Thermo-Reflectance (TTR) laser based technique. The results demonstrated
that the intrinsic thermal conductivity of a 40 nm PMMA film deposited on native oxide
of silicon increases by a factor of three over bulk PMMA values, and a distinct increase
in the thermal conductivity of PMMA film was observed in ultra-thin (sub 100 nm)
films. This confirmed the importance of film thickness for the through-plane thermal
conductivity value of PMMA film on native oxide of silicon.
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