A 4 × 4 photonic switch matrix was designed, fabricated and characterized. The photonic switch matrix was based on microring resonator (MR) and was fabricated on relatively low-cost silicon-on-insulator (SOI). Independent wavelength channel switching was accomplished by thermo-optic tuning of the MRs through highly localized resistive micro-heaters. The device was fabricated using the relatively mature silicon fabrication technology. Waveguide patterns were defined with high definition eBeam lithography, etching was done in a reactive-ion etching chamber, and the top cladding SiO2 layer was deposited through plasma-enhanced chemical vapor deposition. Finally, resistive Nichrome micro-heaters were deposited locally directly above each MR to offer the dynamic tuning capability. The strong optical confinement offered by the high index contrast between silicon and SiO2 makes it possible to fabricate micrometer-sized MRs with acceptable optical power loss caused by the small bending radii. The MRs were designed with a uniform diameter of 10 µm to support a wide free spectral range. All waveguides have a design dimension of 450 nm × 250 nm to allow operation exclusively in the fundamental mode at the 1.55 µm wavelength. A FSR of 18 nm with a spectral linewidth of 0.1 nm were observed for the fabricated MRs offering high wavelength selectivity. The device exhibits virtually no thermal crosstalk between adjacent channels, showing no output peak wavelength shift at 0.01 nm wavelength measurement precision by thermally tuning an adjacent MR with electric current as high as 7 mA, which is equivalent to about 2.5 nm in resonance wavelength tuning. The device showed a tuning delay time of about 1 ms. The overall bare chip size of the device is 20 mm × 4 mm. We demonstrated through this work a wavelength selective photonic switch device using low-cost SOI technology that is compact and easy to fabricate. It shows high potential for further development into high port-count photonic switch matrix.

In this paper, we present the results of the design and fabrication of a 12 channel nano-membrane-based optical phased array that allows for large angle beam steering operating at wavelength=1.55µm. Our device is fabricated on silicon-on-insulator using standard CMOS process. By implementing unequally spaced waveguide array elements, we can relax the half-wavelength spacing requirement for large angle beam steering, thereby avoiding the optical coupling between adjacent waveguides and reducing the side-lobe-level of the array radiation pattern. 1D beam steering of tranverse-electric polarized single mode light is designed to be achieved thermo-optically through the use of thin film metal phase shifters. / text

A fully integrated optical chem/bio sensor complete with integrated source, chemically sensitive waveguide, detector arrays, and associated signal processing electronics on a Si-CMOS chip is a challenging, but highly desirable goal. An evanescent-wave multimode interferometric sensing element is a sensitive method for sensing, which is easily integrated on Si-CMOS. This work is concerned with the design, analysis, and demonstration of a planar multimode interferometric chem/bio sensor that is compatible with the fabrication constraints of Si-CMOS. A 4000-micron-long interferometric that can be adapted for different agents by a particular sensing layer has been fabricated on silicon using silicon dioxide and silicon oxynitride. Hexaflouro-isopropanol substituted polynorbornene is the sensing layer. This sensor has also been fabricated on a Si-CMOS circuit with embedded photodetectors. A sensor on silicon was demonstrated with a minimum detectable index change of 2.0x10-6 using an accurate gas delivery system and a custom hermetic waveguide test chamber. A modal pattern analysis strategy has also been developed to extract the optimal SNR from the measured modal patterns. An understanding of the noise processes and spatial bandwidth effects has enabled an experimentally-based prediction of the index sensitivity of a fully integrated multimode chem/bio sensor on Si-CMOS at 9.2 x10-7. Theoretically, the sensitivity enhancement of high over low index sensing layers and transverse-magnetic over transverse electric modes is described. Also, the sensitivity enhancement of higher-order-transverse modes has been quantified. The wide-angle beam propagation method has been used to simulate the sensor. This simulation showed the relation between the modal pattern repetition period and sensor sensitivity. Further, the modal coupling properties of the multimode y-junction have been described. A second multimode y-junction has been designed to change the modal excitation under the SL, and thus the sensitivity. The chemo-optic response of the `substituted polynorbornene' polymer., hexaflouro-isopropanol substituted polynorbornene to methanol, water, iso-propanol, and benzene has been measured. Also, its thermo-optic response has been measured. Athermal interferometric chem/bio sensors have then been suggested.

No description available.

Estruturas fotônicas à base de silício têm despertado grande interesse por permitirem uma perfeita integração entre processos ópticos e eletrônicos em um único chip. Além de compatíveis com a atual indústria microeletrônica, acredita-se, que tais estruturas possam aumentar consideravelmente a velocidade de processamento de informações. Uma microcavidade óptica é um exemplo de estrutura fotônica simples. Feita à base de silício, e dopada com íons terra-rara, tal microcavidade pode intensificar a emissão gerada pelo íon e resultar em um dispositivo de importância tecnológica. O projeto-construção deste tipo de microcavidade deve considerar a sua região de funcionamento e os materiais a serem utilizados. Deve contemplar, ainda, algumas condições externas que, eventualmente, possam alterar o seu funcionamento. Uma dessas condições é descrita pelo chamado coeficiente termo-óptico que indica a dependência do índice de refração com a temperatura. Dentro desse contexto a presente Tese de Doutorado foi dedicada ao estudo de microcavidades ópticas com janelas de transmissão em 650 nm e em 1550 nm – correspondendo às regiões de menores perdas de fibras ópticas de plástico e de sílica. As microcavidades compreenderam espelhos de Bragg [camadas alternadas de silício amorfo (a-Si) e nitreto de silício amorfo (a-SiN)], um filme de a-SiN como espaçador, e foram depositadas sobre substratos de sílica pela técnica de sputtering. As cavidades MC-Er e MC-ErYb tiveram como espaçadores filmes de a-SiN dopados com Er e Er + Yb, respectivamente. Medidas de fotoluminescência da MC-ErYb na região do infravermelho próximo indicaram um aumento de 48 vezes na emissão dos íons Er3+ (em ~1535 nm) comparado a um filme de a-SiN dopado com érbio devido: (1) a presença do itérbio e, (2) às múltiplas reflexões sofridas pela luz nos espelhos de Bragg. As microcavidades cujos espaçadores eram a-SiN puro foram submetidas a medidas de transmissão óptica em função da temperatura de medida. O deslocamento da janela de transmissão devido às variações de temperatura permitiu determinar o valor do TOC do a-SiN como: (6.2±0.1)×10-5 ºC-1 (em ~ 620 nm) e, (4.7±0.1)×10-5 ºC -1 (em ~ 1510 nm). Até onde sabemos, o TOC do a-SiN no VIS foi determinado pela primeira vez neste trabalho. / Silicon photonic based structures have attracted great interest for allowing a perfect integration between optical and electronic process in a single chip. Besides being compatible with the actual microelectronic industry, it is believed that such structures can considerably increase the information processing speed. An optical microcavity is an example of a simple photonic structure. Made based on silicon, and doped with rare-earth ions, such microcavity may enhance the emission generated by the ion and become a device of technological importance. The project-construction of this kind of microcavity has to consider the operation region and the materials used. It still has to take into account external conditions that may, eventually, change its operation. One of these conditions is described by the thermo-optic coefficient (TOC) that shows the dependence of the refractive index with the temperature. Within this context the present PhD thesis was dedicated to the study of optical microcavities with transmission windows at 650 nm and at 1550 nm – corresponding to the low losses regions of the plastic and silica optical fibers. The microcavities comprised Bragg mirrors [alternated layers of amorphous silicon (a-Si) and amorphous silicon nitride (a-SiN)], one film of a-SiN as spacer, and were deposited on silica substrates by the sputtering technique. The MC-Er and MC-ErYb cavities had Er and Er+Yb-doped a-SiN films as spacers, respectively. Photoluminescence measurements of the MC-ErYb in the near infrared showed an enhancement of 48 times in the emission of the Er3+ ions (at ~ 1535 nm) compared with an Er-doped a-SiN film owing to: (1) the presence of ytterbium and, (2) the multiple reflections experienced by the light at the Bragg mirrors. The microcavities whose spacers were pure a-SiN were submitted to optical transmission measurements as a function of the measurement temperature. The shift of the transmission window due to variations in the temperature allowed determining the a-SiN TOC: (6.2±0.1)×10-5 ºC-1 (at ~ 620 nm) and, (4.7±0.1)×10-5 ºC -1 (at ~ 1510 nm). To the best of our knowledge, the a-SiN TOC in the visible was determined for the first time in this work.

Estruturas fotônicas à base de silício têm despertado grande interesse por permitirem uma perfeita integração entre processos ópticos e eletrônicos em um único chip. Além de compatíveis com a atual indústria microeletrônica, acredita-se, que tais estruturas possam aumentar consideravelmente a velocidade de processamento de informações. Uma microcavidade óptica é um exemplo de estrutura fotônica simples. Feita à base de silício, e dopada com íons terra-rara, tal microcavidade pode intensificar a emissão gerada pelo íon e resultar em um dispositivo de importância tecnológica. O projeto-construção deste tipo de microcavidade deve considerar a sua região de funcionamento e os materiais a serem utilizados. Deve contemplar, ainda, algumas condições externas que, eventualmente, possam alterar o seu funcionamento. Uma dessas condições é descrita pelo chamado coeficiente termo-óptico que indica a dependência do índice de refração com a temperatura. Dentro desse contexto a presente Tese de Doutorado foi dedicada ao estudo de microcavidades ópticas com janelas de transmissão em 650 nm e em 1550 nm – correspondendo às regiões de menores perdas de fibras ópticas de plástico e de sílica. As microcavidades compreenderam espelhos de Bragg [camadas alternadas de silício amorfo (a-Si) e nitreto de silício amorfo (a-SiN)], um filme de a-SiN como espaçador, e foram depositadas sobre substratos de sílica pela técnica de sputtering. As cavidades MC-Er e MC-ErYb tiveram como espaçadores filmes de a-SiN dopados com Er e Er + Yb, respectivamente. Medidas de fotoluminescência da MC-ErYb na região do infravermelho próximo indicaram um aumento de 48 vezes na emissão dos íons Er3+ (em ~1535 nm) comparado a um filme de a-SiN dopado com érbio devido: (1) a presença do itérbio e, (2) às múltiplas reflexões sofridas pela luz nos espelhos de Bragg. As microcavidades cujos espaçadores eram a-SiN puro foram submetidas a medidas de transmissão óptica em função da temperatura de medida. O deslocamento da janela de transmissão devido às variações de temperatura permitiu determinar o valor do TOC do a-SiN como: (6.2±0.1)×10-5 ºC-1 (em ~ 620 nm) e, (4.7±0.1)×10-5 ºC -1 (em ~ 1510 nm). Até onde sabemos, o TOC do a-SiN no VIS foi determinado pela primeira vez neste trabalho. / Silicon photonic based structures have attracted great interest for allowing a perfect integration between optical and electronic process in a single chip. Besides being compatible with the actual microelectronic industry, it is believed that such structures can considerably increase the information processing speed. An optical microcavity is an example of a simple photonic structure. Made based on silicon, and doped with rare-earth ions, such microcavity may enhance the emission generated by the ion and become a device of technological importance. The project-construction of this kind of microcavity has to consider the operation region and the materials used. It still has to take into account external conditions that may, eventually, change its operation. One of these conditions is described by the thermo-optic coefficient (TOC) that shows the dependence of the refractive index with the temperature. Within this context the present PhD thesis was dedicated to the study of optical microcavities with transmission windows at 650 nm and at 1550 nm – corresponding to the low losses regions of the plastic and silica optical fibers. The microcavities comprised Bragg mirrors [alternated layers of amorphous silicon (a-Si) and amorphous silicon nitride (a-SiN)], one film of a-SiN as spacer, and were deposited on silica substrates by the sputtering technique. The MC-Er and MC-ErYb cavities had Er and Er+Yb-doped a-SiN films as spacers, respectively. Photoluminescence measurements of the MC-ErYb in the near infrared showed an enhancement of 48 times in the emission of the Er3+ ions (at ~ 1535 nm) compared with an Er-doped a-SiN film owing to: (1) the presence of ytterbium and, (2) the multiple reflections experienced by the light at the Bragg mirrors. The microcavities whose spacers were pure a-SiN were submitted to optical transmission measurements as a function of the measurement temperature. The shift of the transmission window due to variations in the temperature allowed determining the a-SiN TOC: (6.2±0.1)×10-5 ºC-1 (at ~ 620 nm) and, (4.7±0.1)×10-5 ºC -1 (at ~ 1510 nm). To the best of our knowledge, the a-SiN TOC in the visible was determined for the first time in this work.

The Dielectric Loaded Surface Plasmon Polariton Waveguides (DLSPPWs) have recently emerged as a possible solution to carry both optical and electrical signals on- chip. However, in the particular context of optical interconnects, advanced functionalities such as filtering, switching, and routing are required in order to replace in the future the equivalent electronic components which are too much power consumer and also to reduce their footprints. After presenting the interest and limitation of the leakage radiation microscopy method used all along this work, we show several active devices using thermo-sensitive polymers as the dielectric load driven electrically by Joule heating. Then we demonstrate the feasibility of all-optical systems by either doping the dielectric with metallic nanoparticles or by plasmo-thermal eect of a second plasmonic mode providing a localized heating of controlled shape. The dynamic activation of our thermo- optical devices is performed using a homemade fiber-to-fiber setup which allows us to investigate the response time of a plasmo-thermal heating as well as true datacom transmission. Some improvements of the original DLSPPWs performances are proposed by adding a metallic wall on one side of the polymer ridge. This system can act as a compact and athermal polarization converter

Les guides d’ondes plasmoniques à rubans dielectriques (DLSPPW) sont récemment apparus comme une des solutions possible pour le transport de signaux optiques et électriques sur puce. Néanmoins, dans le contexte particulier des interconnections optiques, des fonctionalitées avancées telles que filtrage, commutation, et routage sont nécessaires afin de remplacer dans le futur les composants electroniques équivalents trop gourmands en énergie et aussi réduire leur empreinte. Après une présentation des intérêts et limitations de la technique de micro- scopie à fuite radiative, nous montrons plusieurs composants actifs utilisant pour diélectrique des polymères thermo-sensibles controlés électriquement par eet Joule. Par la suite nous démontrons la faisabilité de systèmes tout optique que ce soit par dopage du polymère par des nanoparticules metalliques ou par eet thermo-plasmonique d’un second mode plasmon permettant un échauement localisé de forme choisie. L’activation dynamique de nos composants thermo-optiques est réalisée grâce à un montage fibre-à-fibre créé spécialement nous permettant d’investiguer le temps de réponse d’un chauage plasmonique ainsi que la transmission de signal télécom. Des améliorations de performances du concept DLSPPW original sont proposées par l’ajout d’un mur métallique sur le côté du ruban de polymère. Ce système peut alors fonctionner comme un convertisseur de polarisation compacte et athermique / The Dielectric Loaded Surface Plasmon Polariton Waveguides (DLSPPWs) have recently emerged as a possible solution to carry both optical and electrical signals on- chip. However, in the particular context of optical interconnects, advanced functionalities such as filtering, switching, and routing are required in order to replace in the future the equivalent electronic components which are too much power consumer and also to reduce their footprints. After presenting the interest and limitation of the leakage radiation microscopy method used all along this work, we show several active devices using thermo-sensitive polymers as the dielectric load driven electrically by Joule heating. Then we demonstrate the feasibility of all-optical systems by either doping the dielectric with metallic nanoparticles or by plasmo-thermal eect of a second plasmonic mode providing a localized heating of controlled shape. The dynamic activation of our thermo- optical devices is performed using a homemade fiber-to-fiber setup which allows us to investigate the response time of a plasmo-thermal heating as well as true datacom transmission. Some improvements of the original DLSPPWs performances are proposed by adding a metallic wall on one side of the polymer ridge. This system can act as a compact and athermal polarization converter

[ES] El desarrollo de los biosensores está permitiendo llevar a cabo análisis bioquímicos cada vez más rápidos, de manera mucho más sencilla y utilizando una menor cantidad de muestra. Esto está dando lugar a aplicaciones en las que se monitorizan parámetros de manera continua y autónoma, aumentando la eficiencia y reduciendo los costes. El tema principal de esta Tesis ha sido el desarrollo y la evaluación de biosensores que se basan en técnicas de transducción óptica, fabricados en silicio poroso, un material nanoestructurado que puede llegar a alcanzar una gran sensibilidad. El trabajo ha consistido en el estudio de la fabricación y la caracterización de membranas de silicio poroso obtenidas a partir de substratos tipo p de baja resistividad. Para ello se ha desarrollado un modelo matemático realista que permite simular el comportamiento del transductor y calcular sus parámetros experimentales. Gracias a esto, se han estudiado propiedades del material como el efecto térmico, llevando a caracterizar el efecto termo-óptico del silicio poroso en el rango infrarrojo del espectro. Además, se ha analizado la infiltración de la muestra en el transductor con el objetivo de mejorar su funcionamiento. Por este motivo, se han examinado diferentes morfologías de poros y se ha implementado un flujo activo durante el sensado, en el cual la sustancia a analizar fluye a través de la membrana porosa, resolviendo problemas de rellenado del sensor y mezclado con otras sustancias. / [CA] El desenvolupament dels biosensors està permetent realitzar anàlisis bioquímics cada vegada més ràpids, de manera molt més senzilla i utilitzant una menor quantitat de mostra. Això està donant lloc a aplicacions en les quals es monitoritzen paràmetres de manera contínua i autònoma, augmentant l'eficiència i reduint els costos. El tema principal d'aquesta Tesis ha sigut el desenvolupament i l'avaluació de biosensors basats en tècniques de transducció òptica, fabricats en silici porós, un material nanoestructurat que pot arribar a aconseguir una gran sensibilitat. El treball ha consistit en l'estudi de la fabricació i la caracterització de membranes de silici porós obtingudes a partir de substrats tipus p de baixa resistivitat. Per a fer-ho, s'ha desenvolupat un model matemàtic realista que permet simular el comportament del transductor i calcular els seus paràmetres experimentals. Gràcies a això, s'han estudiat propietats del material com l'efecte tèrmic, el que ha permés caracteritzar l'efecte termo-òptic del silici porós en el rang infraroig de l'espectre. A més, s'ha analitzat la infiltració de la mostra en el transductor amb l'objectiu de millorar el seu funcionament. Per aquest motiu, s'han examinat diferents morfologies de porus i s'ha implementat un flux actiu durant el sensat, en el qual la substància a analitzar fluïx a través de la membrana porosa, resolent problemes d'ompliment del sensor i mesclat amb altres substàncies. / [EN] The development of biosensors is leading to faster and simpler analyses of biochemical samples, using them in lower quantities. Over the last years, these advances have allowed the emergence of applications where parameters can be monitored continuously and autonomously, increasing the efficiency and reducing the costs. This Thesis has focused on the development and evaluation of biosensors based on optical transducers, which are fabricated with porous silicon, a nanostructured material that is able to reach a high sensitivity. In this work, the fabrication and characterization of porous silicon membranes using heavily doped p-type silicon wafers have been studied. A realistic mathematical model has been developed in order to simulate the transducer's behavior and calculate the experimental parameters. This has led to the study of physical properties such as the thermal effect, where we were able to characterize the thermo-optic coefficient in the near-infrared range. Moreover, the penetration of the sample into the structure has been analyzed. For this purpose, several pore morphologies were examined and an active flow has been implemented during the sensing experiments, where the substance of interest flows through the porous membrane, to solve problems such as the partial filling of the sensor or the mixture of different substances during the experiments. / Martín Sánchez, D. (2019). Desarrollo de biosensores fotónicos basados en membranas de silicio poroso [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/125695

Dans un monde de plus en plus pollué par l'activité industrielle, la détection des espèces gazeuses nocives dans l'atmosphère est d'une importance essentielle. Le marché des capteurs de gaz est déjà bien développé, avec la présence de diverses technologies et principes de détection, chacune présentant des avantages et des inconvénients intrinsèques. Dans le cadre de cette thèse, un alliage entre deux ou plusieurs technologies de détection typiquement utilisées de façon autonome a été visée, afin d'améliorer les performances globales des systèmes capteurs ainsi formées. A ce fin, nous avons conçu et étudié des dispositifs capteurs basées sur la transduction optique, couplée à un matériau sensible au gaz cible à détecter. Plus précisément, nous avons intégré pour la première fois un matériau catalyseur pouvant accélérer le taux d'oxydation des espèces chimiques (tel le monoxyde de carbone ou l'hydrogène) avec une architecture optique capable d'absorber la chaleur cédée lors de cette oxydation. L'augmentation de température occasionnée est traduite en une variation d'intensité lumineuse constituante le signal de sortie du capteur. Les travaux effectués sur les mesures de la dispersion thermique et chromatique de l'indice de réfraction des matériaux constituant le transducteur optique par des techniques d'optique guidé, ellipsométrie et des techniques photométriques sont présentés. Le sondage par moyen optique des propriétés électriques des matériaux semiconducteurs a également été étudié, y compris les variations de ces propriétés en présence des gaz oxydants, réducteurs et combustibles. / In a world suffering from increasing air pollution due to spiraling industrial activity, the detection of toxic gasses in the atmosphere is of paramount importance. The gas detector market is already well developed, and features a wide variety of detection technologies and techniques, each presenting its own set of intrinsic advantages and drawbacks. In this thesis, a combination of two or more technologies typically used independently has been studied in order to improve the global performances of gas detection systems. To this length, we have conceived and studied detector architectures based upon optical transduction systems, coupled with a material presenting a specific sensitivity to the target gas. More precisely, we have for the first time integrated a catalyst designed to accelerate the oxidation rate of chemical species (such as carbon monoxide or hydrogen) with an optical component capable of absorbing the heat generated by the oxidation reaction. The associated increase in temperature is translated to a variation of the optical intensity comprising the exit signal of the detector. The work carried out measuring the chromatic and temperature dispersion of the refractive index of the materials comprising the optical transduction component by guided mode techniques, ellipsometry and photometric techniques is presented. The optical probing of the electrical properties of semiconductor materials has also been studied, including the variations of these properties following interactions with oxidizing, reducing, or combustible gasses.