Cette thèse présente des résultats théoriques et expérimentaux portant sur des écoulements à l'échelle nanoscopique de polymères fondus. L'étude analytique et numérique de l'écoulement d'un film de polymère, préalablement nanostructuré par nanoimpression puis recuit au dessus de sa température de transition vitreuse, a permis de dégager différentes dynamiques de nivellement selon la topographie initiale du film. Certaines ont été appliquées à l'élaboration d'éléments optiques par recuit de nanostructures complexes. Une méthode de mesure de la viscosité Newtonienne et du temps terminal de relaxation d'un polymère déposé en film mince a également pu être développée. Enfin, un travail exploratoire portant sur un procédé de nanoimpression sans épaisseur résiduelle par démouillage est présenté. L'accent a porté sur le calcul précis de la pression de disjonction dans un milieu stratifié en utilisant la théorie moderne de Lifshitz basée sur les propriétés optiques des matériaux en interaction. / This thesis presents a theoretical and experimental work on nanoscale flows of polymer melts. Different leveling dynamics emerge from the analytical and numerical study of the reflow of a polymer film that is first nanoimprinted and then annealed above its glass transition temperature, depending on the initial topography of the film. These concepts were applied to the manufacturing of optical devices from the reflow of complex nanostructures. A method to measure the Newtonian viscosity and the terminal relaxation time of a thin polymer film was also developed. Finally, an exploratory work on a residual-layer-free nanoimprint process based on dewetting is presented. Emphasis was put on the accurate computation of the disjoining pressure in stratified media with the modern Lifshitz theory based on the optical properties of the interacting materials.

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As advances in thin films are made there is a parallel requirement to develop equipment capable of measuring their properties accurately and consistently. In addition there is a need to understand the parameters that are measured. Typical DPI measurements allow both the refractive index (related to density) and the thickness of the adsorbed layer to be calculated with relatively few assumptions, to a very high precision in real time. This thesis presents the research undertaken to develop multiple path length dual polarisation interferometry (MPL-DPI) and absorption enhanced dual polarisation interferometry (AE-DPI). In addition research is presented that can be used to improve the interpretation of the measured parameters for inhomogeneous films and uniaxial films. The new Interferometric technique MPL-DPI allows the thickness and refractive index of in situ and ex-situ coated ultra-thin films to be measured. The procedures and the mathematics required to calculate the properties of films have been described and the technique verified. The technique was demonstrated using films of PMMA, where good agreement was found with complementary techniques. Furthermore, some key features of MPL-DPI were demonstrated using the measurements of interfacially grafted acrylic acid. The absorption enhanced DPI uses the attenuation of the light within the waveguide, due to the light absorbing properties of a film on its surface. As the composition of a film changed, it was shown that the refractive index and extinction coefficients could be used to separate the mass of the components of the film that absorbed light, from the components of the film that did not. With the use of a semi-uniaxial model, the extra data from the attenuation in two polarisations was used to fit the extraordinary and ordinary extinction coefficients. The extraordinary and ordinary extinction coefficients were used to demonstrate that molecular orientation could be implied. The influence that an inhomogeneous film has on the measured thickness, refractive index and extinction coefficient fitted by homogeneous models were investigated. Formulas are presented to explain the thickness, refractive index and extinction coefficient of the measured film. A formula for the total mass per unit area that uses the refractive index was created to account for films that contain molecules of different refractive index increments (dn/dc's). To separate the mass of the individual molecular species from the total mass per unit area, formulas that use the extinction coefficient were derived so molecules that absorb light could be separated from those that do not. The mass calculated from the refractive index and the mass calculated from the extinction coefficient were also examined for uniaxial films. For uniaxial films both measures of the adsorbed mass were found to be relatively accurate and benefited from a partial cancellation of errors. The accuracy of the measurements made by dual polarisation interferometry technology is systematically examined throughout this thesis. Improvements in the calibration routines are suggested and a procedure for the identification and reduction of errors in the phase and contrast is demonstrated.