Deposition of solid state materials span a wide variety of methods and often utilize high energy sources such as plasmas and ultra-violet light resulting in a wide variety of characteristics and applications. A fundamental understanding is essential for furthering the applications of these materials which include catalysis, molecular filtration, electronics, sensing devices, and energy storage among others. A combination of experimental and theoretical work is presented here on several materials including 2D silicates on Pd, boron oxide, and vanadium oxynitride. Silicate formation under low energy electron microscopy demonstrate film permeability to oxygen, while ab initio molecular dynamics simulations reveal the possible initial mechanisms associated with the formation of boron oxide films during atomic layer deposition. Lastly, vanadium oxynitrides have shown preferential sputtering of N over O sites and theoretical binding energies serve as a guide for assigning experimental x-ray photoelectron spectra.