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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"preplating. thin films copper."" "subject:"preplating. thin films chopper.""

1

Chemical vapor deposition reactor design and process optimization for the deposition of copper thin films /

Stephens, Alan Thomas. January 1994 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 1994. / Typescript. Includes bibliographical references (leaves 134-137).
Vapor-plating. Thin films Copper.

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