Abstract The purpose of this thesis is to design and fabricate optical waveguide reflectors by using vertical mirror reflector. In order to reflect the incident optical mode of multi-mode interference coupler, we fabricate the etched vertical reflective mirror surface with dry etch processes. We used the design of etched vertical mirror surfaces to bend the incident optical mode, and changed the length of multi-mode interference coupler for the power splitting ratio and high power output. In order to make total internal reflection in vertical reflective mirror, we used ICP-RIE dry etching process to fabricate vertical and smooth mirror. In this part of design the semiconductor optical filter, we design the 90o vertical mirror reflector and the length of MMI by using a 2¡Ñ2 multi-mode interference coupler to get the power splitter with coupling coefficient. We comprise the ring resonator by two vertical mirror reflector and bended waveguide to displace the cleaved of Fabry-Perot resonator in tradition. In fabrication process, we using dry etching (ICP-RIE) process that is the plasma system high density in all part of this paper. first, we defined the device pattern by using photo-lithography technique in our sample . Second, we etched ridge waveguide by using dry etching ICP-RIE method. In order to decrease the scattering loss, we deep etched bended waveguide and the reflector. Then, we etched the reflector mirror by ICP-RIE dry etching process to get smoother surface. Finally, we used polyimide to flatten the sides of the ridge waveguide and evaporated metal electrode. In the device characteristic, we get the waveguide loss in 35.68dB by Fabry-Perot resonator and a power splitter with 85 percent and 15 percent output. Finally, we could get a transmission frequency about 81GHz from optical transmission spectrum in the filter device.

The purpose of this paper is to fabricate optical waveguide reflectors to reflect the incident optical mode of multi-mode interference coupler by the etched vertical mirror surfaces. We used the design of etched vertical mirror surfaces to bend the incident optical mode, and changed the length of multi-mode interference coupler for the power splitting ratio. By the simulation and design, we could use the multi-mode interference coupler to fabricate optical waveguide reflectors. A 1.52µm symmetric quantum well InGaAlAs/InGaAs epitaxial wafer is used to fabricate the devices. In the device design, we designed a optical waveguide reflector of two inputs and outputs with 90¢X angle. We fabricated a Fabry-Perot laser by two optical waveguide reflectors with 90¢X angle, a 1x2 multi-mode interference coupler and a ring cavity. In addition, we designed optical waveguide reflectors of one input and two inputs, and utilized them to fabricate a Fabry-Perot laser. We also utilized an optical waveguide reflector of one input or two inputs directly to fabricate Fabry-Perot lasers. In fabrication process, firstly, we etched the waveguide to the depth of about 1.81µm by multi-step wet etching. In order to reduce bending loss, we made deep etching for the outside of curve waveguide. Then, we etched the mirror to the depth of about 6µm by multi-step wet etching to have a greater variation of refractive index to reflect the mode of optical waveguide reflectors. Finally, we used polyimide to flatten the sides of the ridge waveguides and evaporated metal pad over the polyimide.