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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

A Study of Time Scales for Plasma Sheath and Boundary Layers on a Surface

Ye, Jyun-Wei 29 August 2012 (has links)
This study uses the Magnetohydrodynamics (MHD) method to simulate unsteady two-dimensional transport variables in argon (Ar) plasma, under low pressure, high density, and weak ionization between two infinite planar electrodes suddenly biased by a negative voltage. Plasma has been widely used in materials processing, thin film manufacturing, light source, nuclear fusion, and etching, etc. Properties of plasmas are also becoming important area for research in physics, chemistry, photonics, aerospace, engineering science and technology. Studying transport processes of plasmas therefore is important. This research consider by electric fields and magnetic fields, viscous, momentum exchange collisions between electrons ions and neutral particles. The computed results in this work quantitatively show density, velocity, electric potential, temperature, magnetic field, viscosity, thermal conductivity of the electrons ions and neutral particles across the sheath to the surfaces suddenly biased by a DC negative voltage. And increase of the boundary layer and sheath thickness. We can compare the theory and the simulation to know the behavior of the plasma near a surface.

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