In this study the relationship between the dynamic response of the flexible substrate and the power generation for energy harvesting system is proposed. High electro-mechanical transformation of piezoelectric materials, high efficient energy transfer of mechanical structure and controlled circuit make the piezoelectric generator a high performance. The devices of cantilevers with lump structures on the flexible substrate and piezoelectric film (ZnO) are designed. Then some individual layers of power generator are stocked in parallel to form a multi-layer system with a broad resonant band width. When the generator is operated in a wide frequency range vibration environment, the multi-layer piezoelectric films in the form of cantilever structures can induce current. First the finite element method for the piezoelectric cantilever beam is constructed by using ANSYS software. Both modal analysis and harmonic response analysis are performed to obtain the structural modal parameters and frequency response functions, respectively. Besides, the beam structure is modeled by 3D coupled field piezoelectric element. This research will apply Taguchi¡¦s method to design including variations of dimensions and material properties for energy harvesting system. The flexible substrate is polymeric film (PET). Imprinting process is applied to transfer the simulated geometric configuration onto a flexible substrate to obtain a maximum power output. The results show the single devices can improve efficiently by using lump structures on the flexible substrate, the generator could achieve maximum OCV of 2.25V which is 0.276£gW every centimeter squared when attached to a stable source of vibration. The multi-layer system can be used in 50~500Hz of low frequency environment. Furthermore, the output voltage (OCV) is upward when the flexible substrate with low Young¡¦s modulus.