Producing more reaction regions on the PEMFC cathode using cavities with micro structures can be used to add more reaction points on the electrode. The original ladder type cavity is limited by the laser diffraction in its manufacture. The flat electrode has its performance improved for 58%. The energy density is increased from 462 mW/cm2 to 720mW/cm2. Pressure required in the micro-structure imprinting is reduced, so as the fuel transportation blocked by mold releasing. The total catalyst amount is cut from 0.5mg/cm2 to 0.25mg/cm2. No obvious performance drop can be found. This shows that most of the reactions happen in the region between catalyst layer and micro hole layer. Limited by the pattern of micro-structure, the electrospray does not perform as expected. In the future, this issue should be considered in making micro-structure.