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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
11

Fluorinated diamond-like carbon films deposited by ion beam CVD

Man, Wai Fan 01 January 1999 (has links)
No description available.
12

Synthesis of carbon and tungsten based thin films by plasma enhanced chemical vapor deposition

Chen, Weifeng 26 April 2007
The main objective of this thesis is to find optimum discharge conditions in plasma reactors to realize controlled synthesis of various carbon-based materials with desired properties. Experimental conditions including substrate biasing, substrate pretreatment, gas flow rate, catalyst coating, and the type of carbon source, play important roles in controlling the nucleation and growth of carbon-based materials. In this Ph.D. work, the effects of various processing factors on nucleation and growth of carbon based materials were systematically investigated. The work has led to a better understanding of how each experimental parameter affects the carbon-based materials growth. Optimization of experiment conditions based on this understanding is beneficial for the controlled synthesis of carbon-based materials with desired properties. In addition, the controlled synthesis of tungsten-based nanostructures using a hot filament reactor was studied.<p>The main results presented in this thesis are: <p>(1) Synthesis of well-aligned carbon nanotube or carbon nanocone films with a glow discharge under a negative substrate biasing. The electric field in the plasma sheath above the substrate has been found to play an important role in controlling the alignment and orientation of nanotubes or nanocones. <p>(2) Synthesis of high purity diamond films using solid graphite as the carbon source by graphite etching. The technique provides a route to realizing deposition of high quality diamond films at low substrate temperatures (typically as low as 350 ℃). <p>(3) Successful synthesis of high quality diamond films on aluminum-coated steels using a graphite etching technique. The aluminum interlayer effectively reduces the graphitization which occurs on a steel substrate. <p>(4) Synthesis of nanocrystalline diamond films with smooth surfaces under high gas flow rates with a positive substrate biasing. Both high gas flow rate and positive biasing effectively increase the nucleation density of diamond and therefore reduce the diamond grain size. <p>(5) Synthesis of high purity crystalline tungsten or tungsten oxide nanorod films by optimizing the filament temperature in a hot filament reactor.
13

Synthesis of carbon and tungsten based thin films by plasma enhanced chemical vapor deposition

Chen, Weifeng 26 April 2007 (has links)
The main objective of this thesis is to find optimum discharge conditions in plasma reactors to realize controlled synthesis of various carbon-based materials with desired properties. Experimental conditions including substrate biasing, substrate pretreatment, gas flow rate, catalyst coating, and the type of carbon source, play important roles in controlling the nucleation and growth of carbon-based materials. In this Ph.D. work, the effects of various processing factors on nucleation and growth of carbon based materials were systematically investigated. The work has led to a better understanding of how each experimental parameter affects the carbon-based materials growth. Optimization of experiment conditions based on this understanding is beneficial for the controlled synthesis of carbon-based materials with desired properties. In addition, the controlled synthesis of tungsten-based nanostructures using a hot filament reactor was studied.<p>The main results presented in this thesis are: <p>(1) Synthesis of well-aligned carbon nanotube or carbon nanocone films with a glow discharge under a negative substrate biasing. The electric field in the plasma sheath above the substrate has been found to play an important role in controlling the alignment and orientation of nanotubes or nanocones. <p>(2) Synthesis of high purity diamond films using solid graphite as the carbon source by graphite etching. The technique provides a route to realizing deposition of high quality diamond films at low substrate temperatures (typically as low as 350 ℃). <p>(3) Successful synthesis of high quality diamond films on aluminum-coated steels using a graphite etching technique. The aluminum interlayer effectively reduces the graphitization which occurs on a steel substrate. <p>(4) Synthesis of nanocrystalline diamond films with smooth surfaces under high gas flow rates with a positive substrate biasing. Both high gas flow rate and positive biasing effectively increase the nucleation density of diamond and therefore reduce the diamond grain size. <p>(5) Synthesis of high purity crystalline tungsten or tungsten oxide nanorod films by optimizing the filament temperature in a hot filament reactor.
14

Growth of nonpolar ZnO films on LiGaO2 substrate by chemical vapor deposition method

Liao, Yen-Hsiang 17 August 2010 (has links)
Nonpolar m-plane ZnO epitaxial film with [10-10] orientation and a-plane ZnO epitaxial film with [11-20]was successfully grown on a large-size [100] and [010] LiGaO2 (LGO) single crystal substrate by chemical vapor deposition (CVD) method. The dependence of growth characteristics on the different growth conditions was investigated. Following the CVD growth, the surface morphologies and epi-film crystallinity were studied by a scanning electron microscopy and X-ray diffraction. Room temperature photoluminescence spectra exhibit a strong near-band-edge emission peak at 377 nm with a negligible green band. Further structural characterizations and defect analysis of nonpolar ZnO material were performed using transmission electron microscope (TEM). This thesis included two different orientations ZnO film. First was ZnO[10-10], which can get good epi-film crystallinity and flat surface morphologies under 750¢J. And we tried to grow under different pressure, the data shown that higher pressure(more than 150 torr) tended to grow ZnO[10-10] orientation on LGO[100] substrate. The other one was ZnO[11-20]. We can get flat and continuous ZnO[11-20] film under 680¢J.
15

Platinum/silica thin films by chemical vapor deposition /

Martin, Tyler Philip, January 2002 (has links)
Thesis (M.S.) in Chemical Engineering--University of Maine, 2002. / Includes vita. Bibliography: leaves 58-62.
16

Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition

Jeon, Taek Soo. January 2002 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.
17

Semi-empirical and numerical modeling of metal-organic chemical vapor deposition

Nami, Ziba 08 1900 (has links)
No description available.
18

LCVD synthesis of carbon nanotubes and their characterization

Bondi, Scott Nicholas. January 2004 (has links) (PDF)
Thesis (Ph. D.)--Mechanical Engineering, Georgia Institute of Technology, 2005. / Z.L. Wang, Committee Member ; Thomas Starr, Committee Member ; Mostafa Ghiaasiaan, Committee Member ; W. Jack Lackey, Committee Chair; Shreyes Melkote, Committee Member. Vita. Includes bibliographical references.
19

Synthesis of aluminum nitride thin films at lower temperatures by metalorganic chemical vapor deposition /

Kidder, John N. January 1996 (has links)
Thesis (Ph. D.)--University of Washington, 1996. / Vita. Includes bibliographical references (leaves [158]-168).
20

The use of ferrocene and camphor for the synthesis of carbon nanotubes using catalystic chemical vapor deposition

Parshotam, Heena 08 July 2008 (has links)
The discovery of carbon nanotubes (CNTs) has sparked great interest in the scientific world because of their remarkable electrical and physical properties. Only a thorough understanding of these properties, however, will allow CNTs to be commercially viable. Essentially, CNTs are graphite-like surfaces of sp2 hybridized carbon atoms in the form of tubes. CNTs could range from single-walled carbon nanotubes (SWNTs), consisting of one cylindrical graphite sheet to multi-walled nanotubes (MWNTs) that have concentric sheets. Nanotubes can be synthesized using a number of techniques such as electric arc–discharge, laser ablation and catalytic chemical vapor deposition (CCVD). In this project the CCVD technique was used for the synthesis of CNTs because of it simplicity and availability. The source of carbon was not the conventional hydrocarbon gas, but was camphor, a botanical hydrocarbon that is a solid at room–temperature. Ferrocene was the catalyst, not only because it has been used before in the synthesis of nanotubes, but it appears to be one of the best catalysts during the CCVD synthesis of nanotubes. The presence of nitrogen gas is known to assist in the synthesis of CNTs that have a bamboo–like structure; hence the effect of carrier gases such as nitrogen, argon/hydrogen and argon on the quality of nanotubes synthesized was investigated. Initially, the optimal experimental method for the synthesis of CNTs was determined by varying the reaction path length, temperature, mixing the catalyst and carbon source together or keeping them separate and varying the %m/m of the catalyst to carbon source. It was found that either an increase in the reaction temperature or an increased path length resulted in an increase in the mass of product obtained, whereas mixing the catalyst and carbon source together as opposed to them being separated only caused a slight variation in the mass of product synthesized. The mass of product synthesized also increased as the catalyst concentration increased. The remainder of the project was aimed at investigating the role of different gases: nitrogen, argon and hydrogen (in argon) in the CCVD synthesis of CNTs. The resulting materials were characterized using transmission electron microscopy (TEM), thermogravimetric analysis (TGA) and laser Raman analysis. The results indicated that this method could be tailored to synthesize either carbon spheres or carbon nanotubes of specific diameters and quality. Finally, in an attempt to synthesize aligned carbon nanotubes, catalyst supports {characterized using Brunauer-Emmett-Teller analysis (BET)} namely; silica, alumina and magnesium oxide were used. Although this was not successful for the synthesis of aligned CNTs under the conditions used, alumina showed the most promise. / Mr. S. Durbach Dr. R. W. Krause

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