abstract: Sensing and controlling current flow is a fundamental requirement for many electronic systems, including power management (DC-DC converters and LDOs), battery chargers, electric vehicles, solenoid positioning, motor control, and power monitoring. Current Shunt Monitor (CSM) systems have various applications for precise current monitoring of those aforementioned applications. CSMs enable current measurement across an external sense resistor (RS) in series to current flow. Two different types of CSMs designed and characterized in this paper. First design used direct current reading method and the other design used indirect current reading method. Proposed CSM systems can sense power supply current ranging from 1mA to 200mA for the direct current reading topology and from 1mA to 500mA for the indirect current reading topology across a typical board Cu-trace resistance of 1 ohm with less than 10 µV input-referred offset, 0.3 µV/°C offset drift and 0.1% accuracy for both topologies. Proposed systems avoid using a costly zero-temperature coefficient (TC) sense resistor that is normally used in typical CSM systems. Instead, both of the designs used existing Cu-trace on the printed circuit board (PCB) in place of the costly resistor. The systems use chopper stabilization at the front-end amplifier signal path to suppress input-referred offset down to less than 10 µV. Switching current-mode (SI) FIR filtering technique is used at the instrumentation amplifier output to filter out the chopping ripple caused by input offset and flicker noise by averaging half of the phase 1 signal and the other half of the phase 2 signal. In addition, residual offset mainly caused by clock feed-through and charge injection of the chopper switches at the chopping frequency and its multiple frequencies notched out by the since response of the SI-FIR filter. A frequency domain Sigma Delta ADC which is used for the indirect current reading type design enables a digital interface to processor applications with minimally added circuitries to build a simple 1st order Sigma Delta ADC. The CSMs are fabricated on a 0.7µm CMOS process with 3 levels of metal, with maximum Vds tolerance of 8V and operates across a common mode range of 0 to 26V for the direct current reading type and of 0 to 30V for the indirect current reading type achieving less than 10nV/sqrtHz of flicker noise at 100 Hz for both approaches. By using a semi-digital SI-FIR filter, residual chopper offset is suppressed down to 0.5mVpp from a baseline of 8mVpp, which is equivalent to 25dB suppression. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011

Over the past two decades, Micro-Electro-Mechanical System (MEMS) based accelerometers, benefiting from relatively simple structure, low-power consumption, high sensitivity, and easy integration, have been widely used in many industrial and consumer electronics applications. For the high precision accelerometers, a significant technical challenge is to design a low-noise readout circuit to guarantee the required high resolution of the entire integrated system. There are three main approaches for improvement of the noise and offset of the readout circuit, namely auto-zero (AZ) and correlated double sampling (CDS) for the switched- capacitor (SC) circuit and chopper stabilization (CHS) for the continuous-time circuit. This thesis investigates the merits and drawbacks of all three techniques for reading the capacitance of a low noise MEMS accelerometer developed in our group. After that, we compare the different effects of the three technologies on noise, offset, output range, linearity, dynamic range, and gain. Next, we present the design of the most suitable structure for our sensor to achieve low noise, low offset, and high precision within the working frequency. In this thesis, the design and post-layout simulation of the circuit is proposed, and the fabrication is currently in progress. The readout circuit has reached the noise floor of the sub-μg, which meets the strict requirements of low noise MEMS capacitance-to-voltage converter. A high-performance accelerometer system is regarded as the core of a low-noise, high-resolution geophone. We show that together with the MEMS accelerometer sensor, the readout circuit provides competitive overall system noise and guarantees the required resolution.