In this work, membrane set(s) had been incorporated into different crossflow electrofiltration (CEF) /electrodialysis (ED) treatment modules for treating various CMP wastewaters and simultaneously generating two streams of electrolytic ionized water (EIW). In general, CMP wastewaters have high alkalinity, turbidity, total solids content and silica content. In this investigation, CMP wastewaters were obtained from two wafer fabs in Taiwan and characterized by various standard methods. Then they were treated by the aforementioned treatment modules. Experiments were carried out based on the fractional factorial design and the L8 orthogonal arrays of the Taguchi method. Experimental factors such as electric field strength, transmembrane pressure for CEF, etc. were used to investigate their effects on the permeate qualities (i.e., oxidation-reduction potential, pH, etc.). According to the results of analysis of normal probability plots, analysis of variance (ANOVA) and regular analysis, the electric field strength was presumed to be a very significant parameter. Experimental results showed that filtrate flux increased with the increasing applied electric field strength. The permeate has a turbidity of below 1 NTU, TOC of below 3 mg/L, and TDS of below 250 mg/L under various operating conditions. Other permeate qualities were 15~22 mg/L of K, 53~68 mg/L of silica, 2~4 mg/L of NH4+ and 134~680 £gS/cm of electrical conductivity. But the values of electrical conductivity, pH, and oxidation-reduction potential (ORP) varied substantially for the anolyte EIW and catholyte EIW. Using these novel treatment modules, the optimal ORP and pH values of the anolyte EIW were 211.8 mV, 4.52 and 214.1 mV, 4.83, respectively, for single- and multi-membrane sets. The optimal ORP and pH values of the catholyte EIW were -165.0 mV, 11.21 and -172.0 mV, 10.81, respectively, for single- and multi-membrane sets. It is clear that permeate obtained in this study is suitable for high-level recycling. To further upgrade the water quality of permeate obtained above, a reverse osmosis (RO) unit was added to the treatment system. The water quality of silica for post-RO permeate were decreased from 53.7 to 0.98 mg/L for the anolyte EIW and from 68.05 to 1.32 mg/L for the catholyte EIW. The removal rates of Na and K by the RO unit were not significant. In addition, other unique properties of EIW (e.g., pH, ORP, and cluster size of water molecules) remained almost the same in post-RO permeate. The total recovery rate of the treated water could be above 85%. Therefore, the treated water at this stage could be reused as the cleaning media for the wafer surfaces or reused for the DI water production apparatus.

A real-time, mobile Scanning Electrical Mobility Spectrometer (SEMS) was designed using a Condensation Particle Counter (CPC) and Differential Mobility Analyzer (DMA) to measure the size distribution of nanoparticles. The SEMS was calibrated using monodisperse Polystyrene Latex (PSL) particles, and was then applied to study the size distribution of TiO2 nanoparticle aerosols generated by spray drying water suspensions of the nanoparticles. The nanoparticle aerosol size distribution, the effect of surfactant, and the effect of residual solvent droplets were determined. The SEMS system was designed by integrating the Electrical System, the Fluid Flow System, and the SEMS Software. It was calibrated using aerosolized Polystyrene Latex (PSL) spheres with nominal diameters of 99 nm and 204 nm. TiO2 nanoparticle aerosols were generated by atomizing water suspensions of TiO2 nanoparticles using a Collison nebulizer. Size distribution of the TiO2 aerosol was measured by the SEMS, as well as by TEM. Furthermore, the effect of surfactant, Tween 20 at four different concentrations between 0.01mM and 0.80mM, and stability of aerosol concentration with time were studied. It was hypothesized that residual particles in DI water observed during the calibration process were a mixture of impurities in water and unevaporated droplets. Solid impurities were captured on TEM grids using a point-to-plane Electrostatic Precipitator (ESP) and analyzed by Energy Dispersive Spectroscopy (EDS) while the contribution of unevaporated liquid droplets to residual particles was confirmed by size distribution measurements of aerosolized DI water in different humidity conditions. The calibration indicated that the mode diameter was found to be at 92.5nm by TEM and 95.8nm by the SEMS for 99nm nominal diameter particles, a difference of 3.6%. Similarly, the mode diameter for 204nm nominal diameter particles was found to be 194.9nm by TEM and 191nm by SEMS, a difference of 2.0%. Measurements by SEMS for TiO2 aerosol generated by Collison nebulizer indicated the mode diameters of 3mM, 6mM, and 9mM concentrations of TiO2 suspension to be 197.5nm, 200.0nm and 195.2nm respectively. On the other hand, the mode diameter was found to be approximately 95nm from TEM analysis of TiO2 powder. Additionally, concentration of particles generated decreased with time. Dynamic Light Scattering (DLS) measurements indicated agglomeration of particles in the suspension. Furthermore, the emulation of single particle distribution was not possible even after using Tween 20 in concentrations between 0.01mM and 0.80mM. From the study of residual particles in DI water, it was found that residual particles observed during the aerosolization of suspensions of DI water were composed of impurities present in DI water and unevaporated droplets of DI water. Although it was possible to observe solid residual particles on the TEM grid, EDS was not able to determine the chemical composition of these particles.