The machining of materials on micrometer and sub-micrometer scale is considered the technology of the future. The current techniques for micro manufacturing mostly are silicon based. These manufacturing techniques are not suitable for use in demanding applications like aerospace and biomedical industries. Micro electrochemical machining (μECM) removes material while holding micron tolerances and μECM can machine hard metals and alloys. This study aims at developing a novel μECM utilizing high frequency voltage pulses and closed loop control. Stainless steel SS-316L and copper alloy CA-173 were chosen as the workpiece materials. A model was developed for material removal rate. The research studied the effect of various parameters such as voltage, frequency, pulse ON/OFF time, and delay between pulses of the stepper motor on the machined profiles. Experimental data on small drilled holes agreed with theoretical models within 10%. Micro burrs can be effectively removed by optimal μECM. A sacrificial layer helped to improve the hole profile since it reduced 43% of corner rounding.