Neste trabalho desenvolvemos duas séries de EODs operando em regime simultâneo de modulação das componentes de fase e de amplitude de uma frente de luz (Modulação Complexa Completa MCC). A primeira destas séries foi constituída por Hologramas de Fourier calculados através do Algoritmo Iterativo da Transformada de Fourier (Iterative Fourier Transform Algorithm IFTA) e a segunda, por Hologramad de Fresnel cujo cálculo da propagação da luz foi obtido por filmagem linear espacial proveniente da solução da Equação de Helmholtz no domínio da frequência. Nos dois casos, a Modulação Complexa Completa foi implementada fisicamente empregando, para realizar a modulação de fase, um micro-relevo gravado em um filme de DLC (Diamond Like Carbon) depositado sobre um substrato de vidro. Sobre este relevo foi implementada a modulação de amplitude, através da deposição de um filme de alumínio, no qual foram realizadas micro-aberturas diferentes cujas áreas eram proporcionais à amplitude em cada pixel. Nos Hologramas de Fourier, uma diferente espessura do filme DLC localizada sobre cada pixel foi responsável pela modulação do valor de fase relativo àquele ponto. Nos Hologramas de Fresnel, a combinação de duas espessuras diferentes do filme de DLC em cada pixel foi responsável pela modulação do valor de fase relativo a cada ponto. Os elementos foram caracterizados física e opticamente e produziram imagens de reconstrução totalmente livres de ruídos do tipo speckle. Também em caráter de avaliação dos resultados foi efetuada a comparação entre as imagens de reconstrução óptica produzidas pelos Hologramas de Fresnel com MCC com as produzidas por Hologramas de Fresnel convencionais em regime de modulação de fase. / In this work, we developed two sets of DOESs able to modulate both phase and amplitude components of light simultaneously (Complete Complex Modulation CCM). The first set is composed of Fourier Holograms calculated by Iteractive Fourier Transform Algorithm (IFTA). The second set is composed by Fresnel Holograms, which light propagation was calculated by spatial linear filtering obtained from the solution of the Helmholtz Equation in the frequency domain. In both cases, Complete Complex Modulation was physically implemented by a micro-relief, for phase modulation, recorded on a Diamond Like Carbon (DLC) film deposited on a glass substrate. Amplitude modulation was implemented on a aluminum fim layer deposited on this relief. In this layer, micro-appertures proportional to the amplitude on each pixel, were recorded. Phase modulation in each pixel of the Fourier Holograms was achivied by different thicknesses of the DLC film. For Fresnel Holograms, phase modulation was achieved by combining two different thicknesses of DLC film inside each pixel. The elements were physically and optically characterized and produced reconstruction images completly free of speckle like noise. The optical reconstruction images produced from Fresnel Holograms working in CCM regime and convencional phase-only modulated Fourier Holograms were compared.

La lumière du soleil est un bon candidat comme source propre et abondante d'énergie renouvelable. Cette source d'énergie écocompatible peut être exploitée pour répondre aux besoins croissants en énergie du monde. Plusieurs générations de cellules photovoltaïques ont été utilisées pour convertir directement la lumière solaire en énergie électrique. La troisième génération de type multijonction des cellules photovoltaïques est caractérisée par un niveau d'efficacité plus élevé que celui de tous les autres types de cellules photovoltaïques. Des dispositifs optiques, tels que des concentrateurs optiques, des séparateurs optiques et des dispositifs optiques réalisant simultanément la séparation du spectre et la concentration du faisceau ont été utilisés dans des systèmes de cellules solaires. Récemment, les Eléments Optiques Diffractifs (EOD) font l'objet d'un intérêt soutenu en vue de leur utilisation dans la conception de systèmes optiques appliqués aux cellules photovoltaïques. Cette thèse est consacrée à la conception d'un EOD qui peut réaliser simultanément la séparation du spectre et la concentration du faisceau pour des cellules photovoltaïques de type multijonction latéral ou similaire. Les EOD qui ont été conçus ont une structure sous-longueur d'onde et fonctionnent en espace lointain pour implanter la double fonction séparation du spectre et concentration du faisceau. Pour cette raison, des outils de simulation ont été développés pour simuler le comportement du champ magnétique à l'intérieur de l'EOD à structure sous-longueur d'onde. De plus, un propagateur hybride rigoureux a aussi été développé, il est basé sur les deux théories de la diffraction, à savoir la théorie scalaire et la théorie rigoureuse. La méthode FDTD (Finite Difference Time Domain) ou méthode de différences finies dans le domaine temporel a été utilisée pour modéliser la propagation du champ magnétique en champ proche c'est-à-dire à l'intérieur et autour de l'EOD. La méthode ASM (Angular Spectrum Method) ou méthode à spectre angulaire a été utilisée pour modéliser de façon rigoureuse la propagation libre en champ lointain. Deux EOD différents ont été développés permettant d'implanter les fonctions souhaitées (séparation du spectre et concentration du faisceau) ; il s'agit d'une part d'un composant diffractif intitulé G-Fresnel (Grating and Fresnel lens) qui combine un réseau avec une lentille de Fresnel et d'autre part d'une lentille hors-axe. Les composants proposés réalisent la séparation du spectre en deux bandes pour une plage visible-proche infrarouge du spectre solaire. Ces deux bandes peuvent être absorbées et converties en énergie électrique par deux cellules photovoltaïques différentes et disposées latéralement par rapport à l'axe du système. Ces dispositifs permettent d'obtenir un faible facteur de concentration et une efficacité de diffraction théorique d'environ 70 % pour les deux bandes séparées. Grâce à une distance de focalisation faible, ces composants peuvent être intégrés dans des systèmes compacts de cellules solaires. La validation expérimentale du prototype fabriqué montre une bonne correspondance entre les performances expérimentales et le modèle théorique / Sunlight represents a good candidate for an abundant and clean source of renewable energy. This environmentally friendly energy source can be exploited to provide an answer to the increasing requirement of energy from the world. Several generations of photovoltaic cells have been successively used to convert sunlight directly into electrical energy. Third generation multijunction PV cells are characterized by the highest level of efficiency between all types of PV cells. Optical devices have been used in solar cell systems such as optical concentrators, optical splitters, and hybrid optical devices that achieve Spectrum Splitting and Beam Concentration (SSBC) simultaneously. Recently, diffractive optical elements (DOE’s) have attracted more attention for their smart use it in the design of optical devices for PV cells applications.This thesis was allocated to design a DOE that can achieve the SSBC functions for the benefit of the lateral multijunction PV cells or similar. The desired design DOE's have a subwavelength structure and operate in the far field to implement the target functions (i.e. SSBC). Therefore, some modelling tools have been developed which can be used to simulate the electromagnetic field behavior inside a specific DOE structure, in the range of subwavelength features. Furthermore, a rigorous hybrid propagator is developed that is based on both major diffraction theories (i.e. rigorous and scalar diffraction theory). The FDTD method was used to model the propagation of the electromagnetic field in the near field, i.e. inside and around a DOE, and the ASM method was used to model rigorously propagation in the free space far field.The proposed device required to implement the intended functions is based on two different DOE’s components; a G-Fresnel (i.e. Grating and Fresnel lens), and an off-axis lens. The proposed devices achieve the spectrum splitting for a Vis-NIR range of the solar spectrum into two bands. These two bands can be absorbed and converted into electrical energy by two different PV cells, which are laterally arranged. These devices are able to implement a low concentration factor of “concentrator PV cell systems”. These devices also allow achieving theoretically around 70 % of optical diffraction efficiency for the both separated bands. The impact distance is very small for the devices proposed, which allows the possibility to integrate these devices into compact solar cell systems. The experimental validation of the fabricated prototype appears to provide a good matching of the experimental performance with the theoretical model.

This thesis deals with grayscale e-beam lithography and diffractive optical elements fabrication. Three topics are addressed. The first topic is combined grayscale e-beam lithography. The goal of this task is combining exposures performed by two systems with various beam energies. This combined technique leads to a better usage of both systems because various structures can be more easily prepared by one electron beam energy than by the other. The next topic is the optimization of shape borders of exposing structures that are defined by image input. The influence of such optimization on exposure data preparation is evaluated, as well as the exposure time and the change of optical properties of testing structures. The possibility of deep multilevel diffractive optical element fabrication in plexiglass blocks is researched as the third topic. Plexiglass can replace the system of a resist and a substrate. A new approach to writing down the structures by electron beam is presented, minimizing thermal stress on the plexiglass block during the exposure. The writing method also improves the homogeneity of exposed motifs. A method for computing the exposure dose for specific multilevel structures was designed. This method is based on the existing model of proximity effect computation and it minimizes the computing time necessary to obtain the exposure doses.