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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"electron bem lithography simulator""

1

Fabrication of Nanostructures by Low Voltage Electron Beam Lithography

Adeyenuwo, Adegboyega P. Unknown Date
No description available.
lithography
nanofabrication
e-beam
nanostructure
cold development
polymethylmethacrylate
PMMA
negative-tone tone resist
positive-tone tone resist
density multiplication
EBL
electron beam lithography
model of development
fragmentation of PMMA
model of exposure of PMMA
electron beam lithography simulator
density multiplication of nanostructures
monte carlo simulation

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