Microsystem and integrated circuitry components are mostly manufactured using semiconductor technologies. Fabrication using high strength metals, for demanding aerospace, mechanical, or biomedical applications, requires novel technologies which are different from those for silicon. A promising mass production method for micro/meso scale components is electrochemical micromachining. The complex system, however, requires high precision mechanical fixtures and sophisticated instrumentation for proper process control. This study presents an electrochemical micromachining system with a closed-loop feedback control programmed using a conditional binary logic approach. The closed-loop control is realized using electrical current as the dynamic feedback signal. The control system improves material removal rate by 250% through optimizing inter electrode gap and provides robust automation reducing machining variation by 88%. The new system evokes production of higher quality microcomponents. Workpiece damage is reduced by 97% and increased feature sharpness is observed.

Thesis (Ph. D.)--University of Washington, 2001. / Vita. Includes bibliographical references (leaves 131-139).

Thesis--Ph. D., University of Hong Kong. / Mimeographed.

Thesis (Ph. D.)--West Virginia University, 2003. / Title from document title page. Document formatted into pages; contains xii, 156 p. : ill. (some col.) + MPEG video files. Includes MPEG video files. Includes abstract. Includes bibliographical references.

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published_or_final_version / Electrical Engineering / Doctoral / Doctor of Philosophy

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